公开(公告)号：US4149074A

公开(公告)日：1979-04-10

申请号：US717652

申请日：1976-08-25

申请人： Reinhard Schliepe ,  Volker Rindfleisch ,  Karl-Heinz Muller ,  Hans-Martin Thieringer

发明人： Reinhard Schliepe ,  Volker Rindfleisch ,  Karl-Heinz Muller ,  Hans-Martin Thieringer

IPC分类号： H01J37/244 ,  G02B6/04 ,  G02B6/10 ,  G02B6/42 ,  G02B21/00 ,  H01J37/22 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/244 ,  G02B21/002 ,  G02B6/04 ,  G02B6/10 ,  G02B6/4214 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/2802

摘要： A scanning transmission-type electron microscope including an annular-shaped detector disposed concentrically with respect to the optical axis of the microscope behind a specimen along the microscope beam path, and means for amplifying output signals generated by the detector. The detector comprises a scintillation detector and the microscope includes a photoelectron multiplier coupled to the detector and disposed outside the microscope beam. A curved light guide is also coupled to the detector and the photoelectron multiplier and includes a canal which extends through the light guide along the microscope axis for permitting the passage of a central ray cone of the electron beam of the microscope through the light guide.

摘要翻译： 一种扫描透射型电子显微镜，其包括相对于显微镜光路的样本相对于显微镜的光轴同心布置的环状检测器，以及用于放大由检测器产生的输出信号的装置。 检测器包括闪烁检测器，显微镜包括耦合到检测器并设置在显微镜束外部的光电子倍增器。 弯曲光导还耦合到检测器和光电子倍增器，并且包括沿着显微镜轴线延伸穿过光导的管道，以允许显微镜的电子束的中心射线锥通过光导。