公开(公告)号：US10056227B2

公开(公告)日：2018-08-21

申请号：US15461404

申请日：2017-03-16

申请人： HITACHI HIGH-TECH SCIENCE CORPORATION

发明人： Tsuyoshi Oonishi ,  Toshiyuki Iwahori

IPC分类号： G01N23/00 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/305

CPC分类号： H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20235 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A focused ion beam apparatus includes a sample tray on which a sample is placed, and a focused ion beam column for irradiating the sample with a focused ion beam to obtain a micro sample-piece. A sample chamber contains therein the sample tray and the focused ion beam column. A side-entry-type carrier is inserted into and removed from the sample chamber, with a front end side of the carrier holding the sample-piece. A sample-piece moving unit moves the sample-piece between the sample tray and the carrier. The sample tray is movable along at least x, y, and z axes, and an end of the sample tray is provided with a carrier engagement part releasably engageable with the carrier so that movement of the sample tray is accompanied by corresponding movement of the carrier.

公开(公告)号：US10020162B2

公开(公告)日：2018-07-10

申请号：US15451546

申请日：2017-03-07

申请人： JEOL Ltd.

发明人： Yuko Shimizu ,  Akira Yasuhara ,  Kazuya Yamazaki ,  Fumio Hosokawa

IPC分类号： G01N23/00 ,  H01J37/147 ,  H01J37/28 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26

CPC分类号： H01J37/1478 ,  H01J37/1471 ,  H01J37/20 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1506 ,  H01J2237/221 ,  H01J2237/223 ,  H01J2237/2802

摘要： There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (−X) relative to the reference axis, the second direction (−X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.

公开(公告)号：US10018824B2

公开(公告)日：2018-07-10

申请号：US15802876

申请日：2017-11-03

申请人： Integrated Dynamic Electron Solutions, Inc.

发明人： Bryan W. Reed

IPC分类号： G01N23/00 ,  G02B21/36 ,  G06T11/00 ,  H01J37/22 ,  H01J37/28 ,  H01J37/26 ,  G01N23/225

CPC分类号： G02B21/365 ,  G01N23/225 ,  G06T11/003 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/24455 ,  H01J2237/262 ,  H01J2237/2802

摘要： Methods and systems for temporal compressive sensing are disclosed, where within each of one or more sensor array data acquisition periods, one or more sensor array measurement datasets comprising distinct linear combinations of time slice data are acquired, and where mathematical reconstruction allows for calculation of accurate representations of the individual time slice datasets.

公开(公告)号：US10014153B2

公开(公告)日：2018-07-03

申请号：US15422936

申请日：2017-02-02

申请人： JEOL Ltd.

发明人： Yuji Kohno

IPC分类号： H01J37/153 ,  H01J37/22 ,  H01J37/28 ,  H01J37/244 ,  H01J37/26

CPC分类号： H01J37/153 ,  H01J37/22 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/24455 ,  H01J2237/2802

摘要： There is provided an electron microscope capable of measuring aberration with high accuracy. The electron microscope (100) comprises: an electron beam source (10) for producing an electron beam (EB); an illumination lens system (101) for focusing the electron beam (EB) onto a sample (S); a scanner (12) for scanning the focused electron beam (EB) over the sample (S); an aperture stop (30) having a plurality of detection angle-limiting holes (32) for extracting rays of the electron beam (EB) having mutually different detection angles from the electron beam (EB) transmitted through the sample (S); and a detector (20) for detecting the rays of the electron beam (EB) passed through the aperture stop (30).

公开(公告)号：US09991087B2

公开(公告)日：2018-06-05

申请号：US14860586

申请日：2015-09-21

申请人： FEI Company

发明人： Erwin Fernand de Jong ,  Sorin Lazar ,  Peter Christiaan Tiemeijer ,  Rudolf Geurink

IPC分类号： H01J37/05 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  H01J37/20 ,  H01J37/285

CPC分类号： H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/2802

摘要： An imaging system for directing a flux of charged particles transmitted through a specimen onto a spectroscopic apparatus, wherein the flux is dispersed by a dispersing device into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis. An adjustable aperture device defines an aperture in a path of the array so as to select a subset of the array to be admitted to a detector, which aperture is delimited in a dispersion direction perpendicular to the propagation axis to allow independent adjustment of both of: a width of the aperture parallel to the dispersion direction; and a position of a center of the aperture relative to the propagation axis.

公开(公告)号：US09978560B2

公开(公告)日：2018-05-22

申请号：US15199350

申请日：2016-06-30

申请人： International Business Machines Corporation

发明人： Marc Adam Bergendahl ,  James John Demarest ,  Christopher J. Penny ,  Roger Allen Quon ,  Christopher Joseph Waskiewicz

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/261 ,  H01J37/28 ,  H01J2237/206 ,  H01J2237/2802 ,  H01J2237/3114

摘要： A system for performing nano beam diffraction (NBD) analysis, includes a focused ion beam (FIB) device for preparing a transmission electron microscopy (TEM) sample, a broad beam ion mill for milling the TEM sample to remove a surface portion of the TEM sample, and a strain analyzer for performing NBD analysis on the milled TEM sample to acquire diffraction data.

公开(公告)号：US20180130634A1

公开(公告)日：2018-05-10

申请号：US15620144

申请日：2017-06-12

申请人： JEOL Ltd.

发明人： Yukihito Kondo ,  Ryusuke Sagawa

IPC分类号： H01J37/22 ,  H01J37/147 ,  H01J37/28 ,  H01J37/09 ,  H01J37/04

CPC分类号： H01J37/22 ,  H01J37/045 ,  H01J37/09 ,  H01J37/1474 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/0435 ,  H01J2237/0453 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2803

摘要： There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).

公开(公告)号：US09922797B2

公开(公告)日：2018-03-20

申请号：US15582073

申请日：2017-04-28

申请人： Technische Universiteit Delft

发明人： Hendrik Willem Zandbergen

IPC分类号： H01J37/20 ,  H01J37/26 ,  B01J19/00

CPC分类号： H01J37/20 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00824 ,  B01J2219/00853 ,  B01J2219/00862 ,  B01J2219/00864 ,  B01J2219/00873 ,  B01J2219/00927 ,  B01J2219/0093 ,  G01N23/2204 ,  G01N2223/418 ,  G01N2223/637 ,  G21K2207/00 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2802

摘要： An improved microreactor for use in microscopy, use of said microreactor, and a microscope comprising said reactor. The present invention is in the field of microscopy, specifically in the field of electron and focused ion beam microscopy (EM and FIB), and in particular Transmission Electron Microscopy (TEM). However its application is extendable in principle to any field of microscopy, especially wherein characteristics of a (solid) specimen (or sample) are studied in detail, such as during a reaction.

公开(公告)号：US20170301511A1

公开(公告)日：2017-10-19

申请号：US15387534

申请日：2016-12-21

申请人： BEIJING UNIVERSITY OF TECHNOLOGY

发明人： XIAODONG HAN ,  JIANFEI ZHANG ,  MAO SHENGCHENG ,  YADI ZHAI ,  XIAODONG WANG ,  ZHIPENG LI ,  TAONAN ZHANG ,  DONGFENG MA ,  XIAOCHEN LI ,  ZE ZHANG

IPC分类号： H01J37/20 ,  H01J37/26

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J2237/20207 ,  H01J2237/20264 ,  H01J2237/2062 ,  H01J2237/2802

摘要： A double-tilt in-situ mechanical sample holder for TEM based on piezoelectric ceramic drive belongs to the field of material microstructure-mechanical properties in-situ characterization, and it comprise two parts of sample holder shaft body and piezoelectric ceramic drive system. The sample holder shaft body comprise tilt stage, sample holder, linear stepping motor, drive rod, drive linkage. The piezoelectric ceramic drive system comprise piezoelectric ceramic loading stage, piezoelectric ceramic, connecting base and the sample loading stage realizing stretch or compression function. The double-axis tilt of the samples in X and Y axis directions is realized by the reciprocating motion back and forth of the drive rod driven by the linear stepping motor. The stretch or compression of the samples is realized by applying voltage on the piezoelectric ceramic to generate displacement and push the sample loading stage by the connecting base. The invention coordinating with high resolution TEM realizes the observation of the microstructure in atomic and even sub angstrom scales, and at the same time it ensures the controllable deformation of nanomaterials, further realizes the integrative research on the material microstructure-mechanical properties and reveals the deformation mechanism of the materials.

公开(公告)号：US09786467B2

公开(公告)日：2017-10-10

申请号：US15067394

申请日：2016-03-11

申请人： JEOL Ltd.

发明人： Hirofumi Iijima

IPC分类号： H01J37/04 ,  H01J37/147 ,  H01J37/26 ,  H01J37/02

CPC分类号： H01J37/147 ,  H01J37/026 ,  H01J37/04 ,  H01J37/26 ,  H01J2237/2614 ,  H01J2237/2802

摘要： A phase plate capable of suppressing electrification and a method of fabricating the plate are provided. The phase plate is for use in an electron microscope and includes a phase control layer provided with a through-hole and at least one conductive layer covering and closing off the through-hole. The conductive layer is formed on at least one of a first surface and a second surface of the phase control layer, the second surface being on the opposite side of the first surface. The phase control layer produces a given phase difference between electron waves transmitted through the phase control layer and electron waves transmitted through the through-hole.