公开(公告)号：US06329655B1

公开(公告)日：2001-12-11

申请号：US09414989

申请日：1999-10-07

申请人： Michael D. Jack ,  Michael Ray ,  John Varesi ,  Jan Grinberg ,  Harold Fetterman ,  Franklin A. Dolezal

发明人： Michael D. Jack ,  Michael Ray ,  John Varesi ,  Jan Grinberg ,  Harold Fetterman ,  Franklin A. Dolezal

IPC分类号： G01J500

CPC分类号： G01J5/02 ,  G01J5/023 ,  G01J5/08 ,  G01J5/0837 ,  G01J5/20 ,  H01Q1/22 ,  H01Q9/28 ,  H01Q21/24

摘要： A radiation sensor. The inventive sensor has a two-level detector structure formed on a substrate in which a thermal detector element is suspended over the substrate as a microbridge structure. A receiver of electromagnetic radiation is provided on the same side of the substrate in a manner that efficiently couples the radiation field to the thermal detector element. The thermal detector element has a sandwich structure including a heater metal layer, a dielectric layer, and a thin film thermo-resistive material. The thermal detector element is suspended out of physical contact with the receiver. In one embodiment, the receiver is an antenna having a crossed bowtie configuration that efficiently couples the radiation field to the detector element. The inventive radiation sensors are especially useful for mm-wave and microwave sensing applications. The sensor can be used individually or in linear or two-dimensional arrays thereof. The invention also is directed to a method of fabricating such a radiation sensor.

摘要翻译： 辐射传感器。 本发明的传感器具有形成在基板上的两级检测器结构，其中热探测器元件作为微桥结构悬挂在基板上。 将电磁辐射的接收器以有效地将辐射场耦合到热检测器元件的方式设置在基板的相同侧上。 热检测器元件具有包括加热器金属层，电介质层和薄膜耐热材料的夹层结构。 热探测器元件与接收器物理接触被暂停。 在一个实施例中，接收机是具有交叉的弓形结构的天线，其将辐射场有效地耦合到检测器元件。 本发明的辐射传感器对于毫米波和微波感测应用特别有用。 传感器可以单独使用或以其线性或二维阵列使用。 本发明还涉及一种制造这种辐射传感器的方法。