公开(公告)号：US06988060B1

公开(公告)日：2006-01-17

申请号：US09629953

申请日：2000-08-01

申请人： Paul Derek Coon ,  Henry Kwok Pang Chau ,  Arun Ananth Aiyer

发明人： Paul Derek Coon ,  Henry Kwok Pang Chau ,  Arun Ananth Aiyer

IPC分类号： G05F17/50

CPC分类号： G03F9/7092 ,  G03F9/7076

摘要： An alignment simulation method simulates the signal waveform for an alignment mark using various alignment methods as well as the signal strength for an alignment mark, which is useful in optimizing the thickness of one or more layers as well as the geometry of the mark. The simulation of signal strength is also useful in optimizing the thickness of a layer for artifact wafers. The alignment simulation method includes accurately modeling the alignment mark, including one or more layers of various thicknesses and materials. The accurate modeling of the alignment mark includes such things as smoothing regions of the alignment mark and generating lateral shifts of the layers. The model of the alignment mark is a series of small pixels, each including the thickness of the layers and the layers indices of refraction. Using scalar diffraction, a complex reflectivity is generated for each pixel and a fast fourier transform is performed on the series of pixels. The results of the fast fourier transform are used to simulate the diffraction intensities for the alignment mark alignment systems, such as LIA or LSA as well as the signal waveforms. The LSA signal waveform, however, requires additional modeling of the alignment mark. An FIA image is generated by removing appropriate orders from the fast fourier transform result and performing an inverse fast fourier transform and repeating the process at different light wavelengths and illumination angles. The signal strength is the maximum value of the image minus the minimum.

摘要翻译： 对准模拟方法使用各种校准方法模拟对准标记的信号波形，以及对准标记的信号强度，其可用于优化一个或多个层的厚度以及标记的几何形状。 信号强度的模拟也可用于优化用于人造晶片的层的厚度。 对准模拟方法包括对准标记的精确建模，包括一层或多层各种厚度和材料。 对准标记的精确建模包括诸如对准标记的平滑区域和产生层的横向偏移的事情。 对准标记的模型是一系列小像素，每个小像素包括层的厚度和层的折射率。 使用标量衍射，为每个像素生成复杂的反射率，并对像素系列执行快速傅里叶变换。 快速傅里叶变换的结果用于模拟对准标记对准系统的衍射强度，如LIA或LSA以及信号波形。 然而，LSA信号波形需要对准标记的附加建模。 通过从快速傅里叶变换结果中去除适当的顺序并执行反向快速傅里叶变换并在不同的光波长和照射角度重复该过程，从而生成FIA图像。 信号强度是图像的最大值减去最小值。

公开(公告)号：US06320345B1

公开(公告)日：2001-11-20

申请号：US09036401

申请日：1998-03-05

申请人： Bausan Yuan ,  Kazuaki Saiki ,  Henry Kwok Pang Chau

发明人： Bausan Yuan ,  Kazuaki Saiki ,  Henry Kwok Pang Chau

IPC分类号： H02P704

CPC分类号： G03F7/70725 ,  G03F7/709 ,  G05B19/416 ,  G05B2219/41117 ,  G05B2219/41408 ,  G05B2219/43065 ,  G05B2219/45028

摘要： A command trajectory drives a stage to produce a smooth motion while minimizing any vibrations or oscillations of the structure. The command trajectory provides an acceleration and a deceleration that have derivatives, known as the jerk, equal to zero at the beginning and end of the acceleration and deceleration periods. Because the jerk is equal to zero at the beginning and end of acceleration and deceleration, the influence of the reactive forces on the positioning system's structure is reduced, thereby minimizing oscillation of the structure. Moreover, the jerk is continuous throughout the acceleration and deceleration periods, resulting in a smooth continuous motion of the stage. The jerk on the stage during acceleration and deceleration has an adjustable duration to reduce the structural disturbances and decrease settling time.

摘要翻译： 命令轨迹驱动一个阶段以产生平滑的运动，同时最小化结构的任何振动或振荡。 命令轨迹提供加速度和减速度，其具有在加速和减速周期的开始和结束时具有等于零的导数。 由于加速和减速开始和结束时的加加速度等于零，因此减小了反作用力对定位系统结构的影响，从而使结构的振荡最小化。 而且，加速和减速期间的加加速度都是连续的，导致平台的平稳连续运动。 加速和减速期间舞台上的冲击具有可调节的持续时间，以减少结构干扰并减少建立时间。