公开(公告)号：US20100230280A1

公开(公告)日：2010-09-16

申请号：US12659268

申请日：2010-03-02

申请人： Shinya Nakamura ,  Hiroaki Iwasawa ,  Yoshihiro Ikeda

发明人： Shinya Nakamura ,  Hiroaki Iwasawa ,  Yoshihiro Ikeda

IPC分类号： C23C14/34

CPC分类号： C23C14/165 ,  H01J37/3408 ,  H01J37/3438 ,  H01J37/3444

摘要： There is provided a low-cost self-sputtering apparatus which is so arranged that, even when an arc discharge occurs for some reasons or other, failure in electric discharge can be prevented. The self-sputtering apparatus has a vacuum chamber in which a substrate to be processed is disposed; a target to be disposed opposite to the substrate; a sputtering power source for charging the target with a negative DC current; an anode shield which is disposed in a manner to enclose a space in front of the target and which is charged with a positive electric potential; and a gas introduction means for introducing a predetermined sputtering gas into the vacuum chamber. The apparatus further has an LC resonance circuit in parallel with an output circuit from the DC power source to the target.

摘要翻译： 提供了一种低成本自溅射装置，其设置成使得即使由于某些原因等发生电弧放电也可以防止放电故障。 自溅射装置具有设置有待处理基板的真空室; 与衬底相对设置的靶; 用于以负DC电流对目标进行充电的溅射电源; 阳极护罩，其以包围靶的前方的空间并且被带有正电位的方式设置; 以及用于将预定的溅射气体引入真空室的气体引入装置。 该装置还具有与从DC电源到目标的输出电路并联的LC谐振电路。

公开(公告)号：US6116675A

公开(公告)日：2000-09-12

申请号：US149038

申请日：1998-09-08

申请人： Hiroaki Iwasawa

发明人： Hiroaki Iwasawa

IPC分类号： B60N3/12 ,  B60R7/04 ,  B60R7/08

CPC分类号： B60N3/12 ,  B60R7/04 ,  B60R7/082

摘要： An overhead console which can be used to accommodate small objects and also to accommodate a remote controller of a garage opener. The overhead console has a latch mechanism for engaging a free end of the cover with the console body to prevent the free end of the cover from falling off when the cover is closed while allowing upward displacement of the cover by a given stroke from the engagement position, as well as a projection arranged in position on an inner surface of the cover. A switch of the remote controller detachable attached to a ceiling of an accommodation chamber can be operated by pushing the cover upward.

摘要翻译： 一个顶棚控制台，可用于容纳小物体，并且还可容纳车库开启器的遥控器。 架空控制台具有用于将盖的自由端与控制台主体接合的闩锁机构，以防止当盖关闭时盖的自由端脱落，同时允许盖向上移动给定行程从接合位置 ，以及布置在盖的内表面上的位置的突起。 可以通过向上推盖来操作附接到容纳室的天花板的可拆卸的遥控器的开关。