公开(公告)号：US07797232B2

公开(公告)日：2010-09-14

申请号：US12042676

申请日：2008-03-05

申请人： Takuya Kuroda ,  Hiroo Kawasaki ,  Fumihiko Kubo

发明人： Takuya Kuroda ,  Hiroo Kawasaki ,  Fumihiko Kubo

IPC分类号： G06Q40/00

CPC分类号： G06Q40/08 ,  G06Q10/0635 ,  G06Q20/10 ,  G06Q40/025

摘要： A risk monitoring system is formed of a client terminal, a risk management apparatus, and a security device. A risk calculation portion in the risk management apparatus calculates the vulnerability of each room inside the workplace quantitatively in terms of three viewpoints: individuals, assets, and space, and calculates a risk value of an internal crime in each room in real time by multiplying the vulnerability by the internal crime probability and the asset value. A risk analysis portion analyzes a risk state on the basis of the risk value thus calculated and the analysis result is displayed on a display portion of the client terminal. It is thus possible to understand a risk situation of an internal crime against assets to protect in real time for enabling an action to be taken appropriately according to the situation.

摘要翻译： 风险监控系统由客户端，风险管理装置和安全装置构成。 风险管理装置中的风险计算部根据个人，资产和空间的三个观点，定量地计算工作场所内的每个房间的脆弱性，并且通过将每个房间的内部犯罪的风险值乘以 内部犯罪概率和资产价值的脆弱性。 风险分析部根据所计算出的风险值对风险状态进行分析，将分析结果显示在客户终端的显示部上。 因此，可以了解内部犯罪资产的风险情况，以便实时保护，以便根据情况适当采取行动。

公开(公告)号：US07718930B2

公开(公告)日：2010-05-18

申请号：US10552267

申请日：2004-04-07

申请人： Hiroo Kawasaki ,  Teruo Iwata ,  Manabu Amikura

发明人： Hiroo Kawasaki ,  Teruo Iwata ,  Manabu Amikura

IPC分类号： H05B3/28 ,  F27B5/14

CPC分类号： H01L21/68757 ,  C23C16/4581 ,  H01L21/67103 ,  H01L21/68785 ,  H01L21/68792

摘要： A thermal processing system has a processing vessel 4, a support post 30 stood on the bottom wall of the processing vessel 4, and a support table 32 internally provided with a heating means 38 and supported on the support post 30. A workpiece W is placed on the upper surface of the support table 32 and is subjected to a predetermined thermal process. The upper, the side and the lower surface of the support table 32 are covered with heat-resistant covering members 72, 74 and 76 to prevent the thermal diffusion of metal atoms causative of contamination from the support table 32. thus, various types of contamination, such as metal and organic contamination, can be prevented.

摘要翻译： 热处理系统具有处理容器4，位于处理容器4的底壁上的支撑柱30和内部设置有加热装置38并支撑在支撑柱30上的支撑台32。 在支撑台32的上表面上进行预定的热处理。 支撑台32的上表面，侧面和下表面被耐热覆盖件72,74和76覆盖，以防止因支撑台32污染的金属原子的热扩散。因此，各种类型的污染 ，例如金属和有机污染物。

公开(公告)号：US20090266808A1

公开(公告)日：2009-10-29

申请号：US12441639

申请日：2007-08-22

申请人： Kazuo Shibata ,  Hiroo Kawasaki

发明人： Kazuo Shibata ,  Hiroo Kawasaki

IPC分类号： H05B3/28

CPC分类号： H05B3/145 ,  C23C16/4581 ,  C23C16/46 ,  H01L21/67103

摘要： A plane heater and a semiconductor heat treatment apparatus having the heater which suppress high frequency induction heating by having an earth electrode therein for suppressing high frequency induction and do not corrode with an excited reaction gas is provided. A plane heater 1 includes a carbon wire heating element CW arranged and sealed two-dimensionally inside a silica glass plate-like member 2 and an earth electrode 3 arranged and sealed two-dimensionally inside the silica glass plate-like member 2 above the above-mentioned carbon wire heating element CW.

摘要翻译： 提供一种具有加热器的平面加热器和半导体热处理设备，该加热器通过在其中具有用于抑制高频感应并且不会被激发的反应气体腐蚀的接地电极来抑制高频感应加热。 平面加热器1包括在二氧化硅玻璃板状构件2内部二维地配置和密封的碳丝加热元件CW，以及在二氧化硅玻璃板状构件2的上方二维配置和密封的接地电极3， 上述碳丝加热元件CW。

公开(公告)号：US20090095731A1

公开(公告)日：2009-04-16

申请号：US12334119

申请日：2008-12-12

申请人： Kentaro Asakura ,  Hiroo Kawasaki

发明人： Kentaro Asakura ,  Hiroo Kawasaki

IPC分类号： F27D11/02

CPC分类号： H01L21/67103 ,  C23C16/4586 ,  C23C16/46

摘要： A mounting table structure arranged in a processing chamber is provided for mounting a target object to be processed on the upper surface. The mounting table structure is characterized in having a mounting table wherein a heating unit are embedded to heat the target object to perform a specified heat treatment to the target object, and a supporting column which stands on the bottom portion of the processing chamber and supports the mounting table. The mounting table structure is also characterized in that a heat-equalizing member spread in a planar direction is embedded above the heating unit in the mounting table.

摘要翻译： 设置在处理室中的安装台结构用于在上表面上安装待加工的目标物体。 安装台结构的特征在于具有安装台，其中嵌入有加热单元以加热目标物体以对目标物体进行特定的热处理;以及支撑柱，其支撑在处理室的底部并支撑 安装台。 安装台结构的特征还在于，在平面方向上扩展的均热构件嵌入在安装台中的加热单元的上方。

公开(公告)号：US20080255898A1

公开(公告)日：2008-10-16

申请号：US12042676

申请日：2008-03-05

申请人： Takuya Kuroda ,  Hiroo Kawasaki ,  Fumihiko Kubo

发明人： Takuya Kuroda ,  Hiroo Kawasaki ,  Fumihiko Kubo

IPC分类号： G06Q10/00

CPC分类号： G06Q40/08 ,  G06Q10/0635 ,  G06Q20/10 ,  G06Q40/025

摘要： A risk monitoring system is formed of a client terminal, a risk management apparatus, and a security device. A risk calculation portion in the risk management apparatus calculates the vulnerability of each room inside the workplace quantitatively in terms of three viewpoints: individuals, assets, and space, and calculates a risk value of an internal crime in each room in real time by multiplying the vulnerability by the internal crime probability and the asset value. A risk analysis portion analyzes a risk state on the basis of the risk value thus calculated and the analysis result is displayed on a display portion of the client terminal. It is thus possible to understand a risk situation of an internal crime against assets to protect in real time for enabling an action to be taken appropriately according to the situation.

摘要翻译： 风险监控系统由客户端，风险管理装置和安全装置构成。 风险管理装置中的风险计算部根据个人，资产和空间的三个观点，定量地计算工作场所内的每个房间的脆弱性，并且通过将每个房间的内部犯罪的风险值乘以 内部犯罪概率和资产价值的脆弱性。 风险分析部根据所计算出的风险值对风险状态进行分析，将分析结果显示在客户终端的显示部上。 因此，可以了解内部犯罪资产的风险情况，以便实时保护，以便根据情况适当采取行动。

公开(公告)号：US20060199131A1

公开(公告)日：2006-09-07

申请号：US10552267

申请日：2004-04-07

申请人： Hiroo Kawasaki ,  Teruo Iwata ,  Manabu Amikura

发明人： Hiroo Kawasaki ,  Teruo Iwata ,  Manabu Amikura

IPC分类号： B01J3/04

CPC分类号： H01L21/68757 ,  C23C16/4581 ,  H01L21/67103 ,  H01L21/68785 ,  H01L21/68792

摘要： A thermal processing system has a processing vessel 4, a support post 30 stood on the bottom wall of the processing vessel 4, and a support table 32 internally provided with a heating means 38 and supported on the support post 30. A workpiece W is placed on the upper surface of the support table 32 and is subjected to a predetermined thermal process. The upper, the side and the lower surface of the support table 32 are covered with heat-resistant covering members 72, 74 and 76 to prevent the thermal diffusion of metal atoms causative of contamination from the support table 32. thus, various types of contamination, such as metal and organic contamination, can be prevented.

摘要翻译： 热处理系统具有处理容器4，位于处理容器4的底壁上的支撑柱30和内部设置有加热装置38并支撑在支撑柱30上的支撑台32。 工件W被放置在支撑台32的上表面上并进行预定的热处理。 支撑台32的上表面，侧面和下表面被耐热覆盖构件72,74和76覆盖，以防止来自支撑台32的污染引起的金属原子的热扩散。 因此，可以防止各种类型的污染，例如金属和有机污染物。

公开(公告)号：US20100224620A1

公开(公告)日：2010-09-09

申请号：US12279953

申请日：2007-02-07

申请人： Kazuo Shibata ,  Hiroo Kawasaki ,  Teruo Iwata ,  Manabu Amikura

发明人： Kazuo Shibata ,  Hiroo Kawasaki ,  Teruo Iwata ,  Manabu Amikura

IPC分类号： H05B3/68

CPC分类号： H05B3/145 ,  H01L21/67103 ,  H05B3/143 ,  H05B3/283 ,  H05B2203/002 ,  H05B2203/003 ,  H05B2203/014 ,  H05B2203/016 ,  H05B2203/037

摘要： [Problem to be Solved] To provide a plane heater including a carbon wire heating element which has an arrangement pattern allowing a heating surface to be a substantially uniform heating temperature plane.[Means to Solve Problem] Surface arrangement densities of a carbon wire heating element CW are different in an inner area and an outer area located in the periphery. The surface arrangement density in the above-mentioned outer area is denser than the surface arrangement density in the inner area. A power supply terminal unit 8 having connection wires for supplying electricity to the above-mentioned heating element CW is arranged in the center on the back side of the above-mentioned silica glass plate-like member 2. The connection wires 4a and 4b connected with the carbon wire heating element in the above-mentioned inner area are connected with the carbon wire heating element CW in the inner area in the center of the above-mentioned silica glass plate-like member. The connection wires 3a and 3b connected with the carbon wire heating element in the above-mentioned outer area are extended from the center of the above-mentioned silica glass plate-like member toward the outer area, and are connected with the carbon wire heating element CW in the outer area, without intersecting the carbon wire heating element CW in the above-mentioned inner area.

摘要翻译： [待解决的问题]提供一种具有碳线加热元件的平面加热器，其具有允许加热表面为基本上均匀的加热温度平面的布置图案。 解决问题的手段碳丝加热元件CW的表面排列密度在内部区域和位于周边的外部区域不同。 上述外部区域中的表面排列密度比内部区域中的表面排列密度更致密。 具有用于向上述加热元件CW供电的连接线的电源端子单元8布置在上述石英玻璃板状构件2的背面的中心。连接线4a和4b与 上述内部区域中的碳丝加热元件与上述石英玻璃板状构件的中心的内部区域中的碳线加热元件CW连接。 与上述外部区域中的碳丝加热元件连接的连接线3a和3b从上述石英玻璃板状构件的中心向外部区域延伸，并与碳线加热元件 CW在外部区域中，而不与上述内部区域中的碳线加热元件CW相交。

公开(公告)号：US20100163188A1

公开(公告)日：2010-07-01

申请号：US12713226

申请日：2010-02-26

申请人： Sumi Tanaka ,  Hiroo Kawasaki

发明人： Sumi Tanaka ,  Hiroo Kawasaki

IPC分类号： H01L21/683 ,  B23Q3/00 ,  H01L21/3065 ,  H01L21/205

CPC分类号： H01L21/67103 ,  H01L21/68742 ,  H01L21/68792

摘要： A mounting table structure 54, provided within a processing chamber 22 of a processing apparatus 20 so as to mount thereon a target object to be processed, includes a mounting table 58 made of a dielectric material and having a heating unit 64; and a cylindrical supporting column 56 which is extended upward from a bottom of the processing chamber and is made of a dielectric material and is configured to detachably support the mounting table 58. A cylindrical protection pipe 60 is fixed to a bottom surface of the mounting table 58 and is made of a dielectric material having a diameter smaller than a diameter of the supporting column. A functional rod member 62 is inserted through an inside of the protection pipe 60 and has an upper end in contact with the mounting table 58.

摘要翻译： 安装台结构54设置在处理装置20的处理室22内，以便安装在其上待处理目标物体上，包括由电介质材料制成并具有加热单元64的安装台58; 以及从处理室的底部向上延伸并由介电材料制成的圆柱形支撑柱56，并被构造成可拆卸地支撑安装台58.圆柱形保护管60固定到安装台的底面 并且由直径小于支撑柱的直径的电介质材料制成。 功能杆构件62穿过保护管60的内部插入，并且具有与安装台58接触的上端。

公开(公告)号：US08143557B2

公开(公告)日：2012-03-27

申请号：US12279953

申请日：2007-02-07

申请人： Kazuo Shibata ,  Hiroo Kawasaki ,  Teruo Iwata ,  Manabu Amikura

发明人： Kazuo Shibata ,  Hiroo Kawasaki ,  Teruo Iwata ,  Manabu Amikura

IPC分类号： H05B3/68

CPC分类号： H05B3/145 ,  H01L21/67103 ,  H05B3/143 ,  H05B3/283 ,  H05B2203/002 ,  H05B2203/003 ,  H05B2203/014 ,  H05B2203/016 ,  H05B2203/037

摘要： To provide a plane heater, including a carbon wire heating element CW, in which surface arrangement density of the heating element CW in an outer area is denser than that in an inner area. A power supply terminal unit having connection wires for supplying electricity to the heating element CW is arranged in the center on the back side of a silica glass plate-like member 2. Connection wires 4a and 4b connected with the heating element CW in the inner area are connected with the heating element in the inner area in the center of the silica glass plate-like member. Connection wires 3a and 3b connected with the heating element in the outer area are extended from the center of the silica glass plate-like member toward the outer area and connected with the heating element CW in the outer area, without intersecting the heating element CW in the inner area.

摘要翻译： 提供包括碳线加热元件CW的平面加热器，其中外部区域中的加热元件CW的表面布置密度比内部区域中的表面布置密度更密。 具有用于向加热元件CW供电的连接线的电源端子单元布置在石英玻璃板状构件2的背面的中心。连接线4a和4b与加热元件CW连接在内部区域 与石英玻璃板状构件的中心的内部区域中的加热元件连接。 与外部区域中的加热元件连接的连接线3a和3b从石英玻璃板状构件的中心向外部区域延伸，并且与外部区域中的加热元件CW连接，而不与加热元件CW相交 内部区域。

公开(公告)号：US07772972B2

公开(公告)日：2010-08-10

申请号：US11802735

申请日：2007-05-24

申请人： Tekuya Kuroda ,  Toshiro Nakao ,  Hiroo Kawasaki ,  Fumihiko Kubo

发明人： Tekuya Kuroda ,  Toshiro Nakao ,  Hiroo Kawasaki ,  Fumihiko Kubo

IPC分类号： G08B29/00

CPC分类号： G06Q10/04 ,  G06Q10/06 ,  G07C9/00007 ,  G08B13/19697 ,  G08B29/20

摘要： States of security and risk are accurately recognized and an appropriate measure can be taken. Therefore, in a security monitoring device connected to a security device for securing security of an asset and monitoring the security, information from the security device is monitored and collected in real time on the basis of a set monitoring condition. On the basis of the monitored and collected information, a security risk change is analyzed and estimated, and the analyzed and estimated results are displayed, etc., and outputted.

摘要翻译： 准确确认安全和风险国家，并采取适当措施。 因此，在连接到安全装置的安全监控装置中，为了确保资产的安全性和监视安全性，基于设定的监视条件，实时监视和收集来自安全装置的信息。 在监测和收集的信息的基础上，对安全风险变化进行分析和估算，并对其进行分析和估计结果进行显示等输出。