公开(公告)号：US5247751A

公开(公告)日：1993-09-28

申请号：US908739

申请日：1992-07-06

申请人： Kiyoshi Ohya ,  Masaru Hachisuka ,  Hiroo Tsumuraya ,  Yoshiyuki Fujita ,  Osamu Arai

发明人： Kiyoshi Ohya ,  Masaru Hachisuka ,  Hiroo Tsumuraya ,  Yoshiyuki Fujita ,  Osamu Arai

IPC分类号： G01B7/00 ,  G01B7/012

CPC分类号： G01B7/012

摘要： A touch probe comprises an ultrasonic vibrating horn having a piezoelectric element which is sandwiched between electrodes and converts an RF electrical signal into ultrasonic vibration, and a feeler to be brought into contact with an object to be measured. The horn is ultrasonically vibrating in accordance with the ultrasonic vibration of said piezoelectric element. The probe further comprises a device for inputting an RF electrical signal between said electrodes so that the RF electrical signal substantially coincides with a mechanical natural frequency of said ultrasonic vibrating horn and a touch detecting device for monitoring a current between said electrodes to detect a touch between the object to be measured and said feeler in accordance with a change in current value produced at the moment said feeler touches the object to be measured.

摘要翻译： 触摸探头包括具有夹在电极之间的压电元件的超声振动喇叭，并将RF电信号转换为超声波振动，以及与被测量物体接触的探测器。 根据所述压电元件的超声波振动，所述喇叭被超声振动。 该探头还包括用于在所述电极之间输入RF电信号的装置，使得RF电信号基本上与所述超声振动喇叭的机械固有频率一致，以及用于监视所述电极之间的电流的触摸检测装置， 根据当前值的变化，被测量物体和所述探测器，该电流值在所述触发器触及被测量物体时产生。