公开(公告)号：US07030539B2

公开(公告)日：2006-04-18

申请号：US10432499

申请日：2002-09-26

申请人： Mitsuhiro Furukawa ,  Kiyoharu Yamashita ,  Kazushi Nishida ,  Hiroshi Kurotake

发明人： Mitsuhiro Furukawa ,  Kiyoharu Yamashita ,  Kazushi Nishida ,  Hiroshi Kurotake

IPC分类号： H03H9/25 ,  H01L41/04

CPC分类号： H03H9/02921 ,  H03H3/08 ,  H03H9/14538

摘要： In a surface acoustic wave device, a common portion and a strip portion of a reflector electrode are partially cut off to increase a space between the electrodes. The increase of the space between the electrodes reduces the influence of the amount of charges and the influence of an unbalance between the amounts of charges in etching of a metallic film, thereby preventing the electrodes from having a curved shape in section. Consequently, the surface acoustic wave device has a reduced propagation loss.

摘要翻译： 在声表面波装置中，反射器电极的公共部分和带状部分被部分切断以增加电极之间的空间。 电极之间的空间的增加减少了金属膜的蚀刻中的电荷量的影响和电荷量之间的不平衡的影响，从而防止电极具有弯曲形状的截面。 因此，表面声波装置的传播损失减小。

公开(公告)号：US06937114B2

公开(公告)日：2005-08-30

申请号：US10469482

申请日：2002-12-25

申请人： Mitsuhiro Furukawa ,  Kiyoharu Yamashita ,  Hiroshi Kurotake ,  Hiroyoshi Sekiguchi

发明人： Mitsuhiro Furukawa ,  Kiyoharu Yamashita ,  Hiroshi Kurotake ,  Hiroyoshi Sekiguchi

IPC分类号： H03H9/02 ,  H03H9/10 ,  H03H9/145 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/14541 ,  H03H9/02661

摘要： A surface acoustic wave device includes a piezoelectric substrate and an electrode provided on the substrate. The electrode includes a first metal layer provided on the piezoelectric substrate and having a trapezoid shape in the cross section and a second metal layer provided over the piezoelectric substrate at the same position as the first metal layer over the piezoelectric substrate. By controlling the shape of side surfaces of the electrode, the surface acoustic wave device hardly vary in a propagation frequency.

摘要翻译： 表面声波装置包括压电基板和设置在基板上的电极。 电极包括设置在压电基板上的第一金属层，并且在压电基板上与第一金属层相同的位置处设置在压电基板上方的第二金属层。 通过控制电极侧面的形状，表面声波装置在传播频率上几乎不变化。