公开(公告)号：US06346418B1

公开(公告)日：2002-02-12

申请号：US09388929

申请日：1999-09-02

Applicant: Hui-An Chang ,  Bor-Jen Cheng ,  Yu-Chuan Lin

Inventor： Hui-An Chang ,  Bor-Jen Cheng ,  Yu-Chuan Lin

IPC: G01N3320

CPC classification number: G03F7/00 ,  G01N1/40 ,  G01N1/44 ,  Y10T436/24 ,  Y10T436/25 ,  Y10T436/25125

Abstract: A method for evaluating ratios of metallic impurities in lithographic materials is disclosed. The method comprises: separating said metal from said lithographic material by microwave heating; then adding said metal to an acid to form a solution; and finally analyzing said solution by a instrument to measure ratio of said metal.

Abstract translation: 公开了评估平版印刷材料中金属杂质比的方法。 该方法包括：通过微波加热从所述平版印刷材料中分离所述金属; 然后将所述金属加入到酸中以形成溶液; 最后通过仪器分析所述溶液以测量所述金属的比例。

公开(公告)号：US20090212794A1

公开(公告)日：2009-08-27

申请号：US12190565

申请日：2008-08-12

Applicant: Chung-I Chang ,  Hui-An Chang ,  Neng-Cheng Wang

Inventor： Chung-I Chang ,  Hui-An Chang ,  Neng-Cheng Wang

IPC: G01R31/305

CPC classification number: H01L22/34 ,  G01R31/2884 ,  G01R31/307

Abstract: A test key for a semiconductor structure is provided for in-line defecting defects of the contact. The test key is disposed on a scribe line of a wafer substrate, and includes conductive structures and contacts under test. The conductive structures are electrically connected with the substrate and the contacts under test are not electrically connected with the substrate. The conductive structures and the contacts under test are regularly arranged in array. When an electronic beam is utilized to perform in-line monitoring, the normal contacts under test will be shown as bright dots and the bright dots are regularly arranged in the array; any contact under test with defect will be shown as a dark dot which results in an irregular arrangement of the bright dots.

Abstract translation: 提供了用于半导体结构的测试键，用于接触的在线缺陷缺陷。 测试键设置在晶片衬底的划线上，并且包括测试中的导电结构和触点。 导电结构与衬底电连接，被测触点不与衬底电连接。 导电结构和被测接点是规则排列的。 当使用电子束进行在线监测时，被测试的正常接触点将显示为亮点，亮点规则排列在阵列中; 任何有缺陷的接触器都将显示为暗点，导致亮点不规则排列。