Wafer stack separator
    1.
    发明申请
    Wafer stack separator 审中-公开
    晶圆堆叠分离器

    公开(公告)号:US20060105498A1

    公开(公告)日:2006-05-18

    申请号:US10917444

    申请日:2004-08-13

    CPC classification number: H01L21/67369 H01L21/67383

    Abstract: An integrated circuit wafer container and separator combination. The separator comprises a substantially flat main area and a plurality of elevated projections in the periphery thereof. The elevated projections sustain the weight of the wafer stacks, avoid vacuum adhesion, and minimize contact with wafers.

    Abstract translation: 集成电路晶片容器和分离器组合。 分离器包括基本上平坦的主区域和在其周边的多个升高的​​突起。 升高的投影维持晶片堆叠的重量,避免真空附着,并最小化与晶片的接触。

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