公开(公告)号：US06794615B2

公开(公告)日：2004-09-21

申请号：US10013089

申请日：2001-12-07

申请人： Jeng-Yang Pan ,  Hung-Fa Chen

发明人： Jeng-Yang Pan ,  Hung-Fa Chen

IPC分类号： F27D1100

CPC分类号： H01L21/68

摘要： Semiconductor wafer tray positioning, such as can be used in rapid thermal processing (RTP), rapid thermal annealing (RTA), and other semiconductor fabrication processes, is disclosed. A housing, such as a quartz tube, to receive a wafer tray includes at least four positioning kits. Each positioning kit includes a primary outside edge and an inside edge. The primary outside edge at least substantially corresponds to an interior sidewall of the housing. The inside edge is opposite of the primary outside edge, and has a groove that at least substantially corresponds to a part of a frame of the wafer tray. The groove is receptive to the part of the frame of the wafer tray, to assist maintaining the wafer tray in a stable position when the tray is completely positioned in the housing.

摘要翻译： 半导体晶片托盘定位，例如可用于快速热处理（RTP），快速热退火（RTA）等半导体制造工艺。 用于接收晶片托盘的诸如石英管的壳体包括至少四个定位套件。 每个定位套件包括主外边缘和内边缘。 主外边缘至少基本上对应于壳体的内侧壁。 内边缘与主外边缘相对，并且具有至少基本对应于晶片托盘的框架的一部分的凹槽。 凹槽容纳晶片托架的框架的一部分，以便当托盘完全定位在壳体中时辅助将晶片托盘保持在稳定的位置。

公开(公告)号：US07067183B2

公开(公告)日：2006-06-27

申请号：US10709168

申请日：2004-04-19

申请人： Bing-Mau Chen ,  Hung-Fa Chen ,  Li-Chun Chung

发明人： Bing-Mau Chen ,  Hung-Fa Chen ,  Li-Chun Chung

IPC分类号： B32B3/02

CPC分类号： G11B7/266 ,  G11B7/2433 ,  G11B7/2578 ,  G11B7/2585 ,  G11B2007/2431 ,  G11B2007/24312 ,  Y10T428/21

摘要： A write once recording medium comprising an inorganic material serving as a recording layer is disclosed. The inorganic material has a formula, A(1−y)My, wherein A is comprised of Si or Sn; M is comprised of Al, Ag, Au, Zn, Ti, Ni, Cu, Co, Ta, Fe, W, Cr, V, Ga, Pb, Mo, In or Te; and y is in the range of 0.02˜0.8.

摘要翻译： 公开了一种包含用作记录层的无机材料的一次写入记录介质。 无机材料具有下式：其中A由Si或Sn组成;其中A由Si或Sn构成; M由Al，Ag，Au，Zn，Ti，Ni，Cu，Co，Ta，Fe，W，Cr，V，Ga，Pb，Mo，In或Te组成; y在0.02〜0.8的范围内。

公开(公告)号：US06877359B2

公开(公告)日：2005-04-12

申请号：US09997906

申请日：2001-11-30

申请人： Chin-Te Huang ,  Hung Fa Chen

发明人： Chin-Te Huang ,  Hung Fa Chen

IPC分类号： G01M3/16 ,  G01M3/04

CPC分类号： G01M3/165 ,  G01M3/16

摘要： Liquid leaks from a vessel cause shorts between at least one elongate sensing wire and another conductor when the fluid absorbs into the porous sheath of the sensing wire. The other conductor may comprise a second elongate sensing wire having similar porous sheath or a conductive tray or other conductive collection means. The sensing wire is placed in proximity to the vessel, such as beneath or immediately adjacent. Shorts are detected from the electrical characteristics of a circuit including the sensing wire and location is determined therefrom.

摘要翻译： 当流体吸收到感测线的多孔护套中时，液体从容器中泄漏导致至少一根细长的感测线与另一导体之间的短路。 另一个导体可以包括具有相似的多孔护套或导电托盘或其他导电收集装置的第二细长感测线。 感测线被放置在容器附近，例如在下方或紧邻处。 根据包括传感线的电路的电气特性检测短裤，并且由此确定位置。