公开(公告)号：US06558878B1

公开(公告)日：2003-05-06

申请号：US09585182

申请日：2000-06-01

申请人： Hyo-Derk Park ,  Suk-Won Jung ,  Kwang-Bum Park ,  In-Hoe Kim ,  Hyun-Chan Moon ,  Kun-Nyun Kim ,  Soon-Sup Park ,  Sang-Mo Shin

发明人： Hyo-Derk Park ,  Suk-Won Jung ,  Kwang-Bum Park ,  In-Hoe Kim ,  Hyun-Chan Moon ,  Kun-Nyun Kim ,  Soon-Sup Park ,  Sang-Mo Shin

IPC分类号： G03F700

CPC分类号： G03F7/7035 ,  G02B3/0012 ,  G03F7/0005 ,  G03F7/0017 ,  G03F7/201 ,  G03F7/2039 ,  Y10S430/167

摘要： Disclosed is a microlens manufacturing method which comprises the step of: positioning a X-ray mask for manufacturing the microlens on an substrate on which a sensitive film is formed, and arranging a rotation axis of the substrate and a central axis of the X-ray mask; applying X-rays to the X-ray mask to expose the sensitive film while fixing the X-ray mask and rotating the substrate; developing the sensitive film to form the microlens; performing an electroplating process on the plating base to form a metal layer; and separating the metal layer from the sensitive film structure and combining the metal layer with a mold frame for injection molding the microlens and manufacturing an injection mold.

摘要翻译： 公开了一种微透镜制造方法，其包括以下步骤：将用于制造微透镜的X射线掩模定位在其上形成敏感膜的基板上，并且布置基板的旋转轴线和X射线的中心轴线 面具; 将X射线施加到X射线掩模以在固定X射线掩模并旋转衬底的同时曝光敏感膜; 开发敏感膜以形成微透镜; 在电镀基底上进行电镀工艺以形成金属层; 并且将金属层与敏感膜结构分离，并将金属层与用于注射成型微透镜并制造注塑模的模架相结合。