Method and apparatus for detecting thickness of thin layer formed on a wafer
    1.
    发明授权
    Method and apparatus for detecting thickness of thin layer formed on a wafer 有权
    用于检测在晶片上形成的薄层厚度的方法和装置

    公开(公告)号:US06515293B1

    公开(公告)日:2003-02-04

    申请号:US09671207

    申请日:2000-09-28

    IPC分类号: G01N2186

    摘要: A method of measuring the thickness of a thin layer, by which the thickness of a top layer formed on the surface of a wafer can be detected in real time, and an apparatus therefor. This method includes irradiating light onto a cell and obtaining luminance from reflected light, detecting the thickness of a thin layer in an oxide site which is adjacent to the cell, repeating the irradiating and detecting steps to obtain a plurality of luminance values from cells formed on the wafer and a plurality of thickness values of thin layers in oxide sites that are adjacent to the cells, and employing a thickness calculation formula for calculating the thickness of a top layer using the plurality of luminance values and plurality of thickness values obtained in the prior steps. The thickness of a thin layer is directly detected from the luminance of light reflected by the cell, so that it can be precisely detected in a non-destructive manner, thus making it possible to detect the thickness of a thin layer in real time during the manufacture of a semiconductor device.

    摘要翻译: 测量薄层厚度的方法,通过该厚度可以实时检测在晶片表面上形成的顶层的厚度及其装置。 该方法包括将光照射到电池上并从反射光获得亮度,检测与电池相邻的氧化物部位中的薄层的厚度,重复照射和检测步骤,从而形成多个亮度值 所述晶片和与所述单元相邻的氧化物部位中的薄层的多个厚度值,并且使用使用所述多个亮度值和在先前获得的多个厚度值来计算顶层的厚度的厚度计算公式 脚步。 从单元反射的光的亮度直接检测薄层的厚度,从而可以以非破坏性的方式精确地检测薄层的厚度,从而使得可以实时地检测薄层的厚度 制造半导体器件。

    Filter and Tobacco Using Technology for Reducing Smell of Tobacco Smoke on Hands
    3.
    发明申请
    Filter and Tobacco Using Technology for Reducing Smell of Tobacco Smoke on Hands 有权
    过滤和烟草使用技术降低手上烟草烟雾的气味

    公开(公告)号:US20150136159A1

    公开(公告)日:2015-05-21

    申请号:US14383527

    申请日:2012-08-29

    IPC分类号: A24D3/06 A24D3/02

    摘要: The filter using technology for reducing the smell of tobacco smoke on hands, according to one embodiment of the present invention, comprises: a filter unit for filtering tobacco smoke, the filter unit being coupled to a tobacco shred; and filter-wrapping paper for wrapping the filter unit. The filter unit or the filter-wrapping paper may contain a material for reducing the smell of tobacco smoke. According to the embodiment of the present invention, green tea extracts containing catechin or other materials for reducing the smell of tobacco smoke, e.g. citric acids, glycerols, tannic acids and the like can be added to a tobacco filter to remove the smell from tobacco smoke generated during smoking, thus significantly lowering the strength of the smell of tobacco smoke on the hands of a smoker as compared to conventional tobacco filters.

    摘要翻译: 根据本发明的一个实施方案,使用用于减少手上烟草烟雾的气味的技术的过滤器包括:用于过滤烟草烟雾的过滤器单元,过滤器单元与烟丝相连; 和用于包装过滤器单元的滤纸包装纸。 过滤器单元或过滤包装纸可以包含用于减少烟草烟雾的气味的材料。 根据本发明的实施方案,含有儿茶素或其它用于减少烟草烟雾气味的材料的绿茶提取物,例如, 柠檬酸,甘油,单宁酸等可以加入到烟草过滤器中以除去吸烟期间产生的烟草烟雾的气味,因此与常规烟草相比,显着降低吸烟者手上的烟草烟雾的强度 过滤器。

    Waste water treatment system
    4.
    发明授权
    Waste water treatment system 失效
    废水处理系统

    公开(公告)号:US07041214B2

    公开(公告)日:2006-05-09

    申请号:US10621580

    申请日:2003-07-18

    IPC分类号: C02F3/00

    CPC分类号: B01J20/28078 B01J20/18

    摘要: An agent is used to treat waste water containing dimethylsulfoxide and includes a solution of a porous material at a concentration of 6500 to 7500 mg/L, where an average size of pore openings of the porous material in a range of 60–550 μm. The agent may be used in an aeration tank of a waste water treatment system, where the aeration tank is connected to a waste water tank for collecting waste water containing dimethylsulfoxide. A sedimentation tank of the system is connected to the aeration tank via a connection pipe for biologically decomposing the dimethylsulfoxide and settling sludge produced therein, and a treated water tank of the system returns a portion of treated waste water to the waste water tank and collects the remaining treated water therein.

    摘要翻译: 用于处理含有二甲基亚砜的废水的试剂包括浓度为6500至7500mg / L的多孔材料的溶液,其中多孔材料的孔开口的平均尺寸在60-550μm的范围内。 该试剂可以用在废水处理系统的曝气池中,其中曝气池连接到用于收集含有二甲基亚砜的废水的废水箱。 系统的沉淀池通过连接管连接到曝气池,用于生物分解其中产生的二甲基亚砜和沉淀污泥,系统的处理水箱将一部分经处理的废水返回到废水箱,并收集 剩余处理水​​。