公开(公告)号：US07176452B2

公开(公告)日：2007-02-13

申请号：US11107583

申请日：2005-04-15

申请人： Ignacio A. Zuleta ,  Richard N. Zare

发明人： Ignacio A. Zuleta ,  Richard N. Zare

IPC分类号： H01J1/46 ,  H01L21/46 ,  H01L23/48

CPC分类号： H01J49/061 ,  H01J49/0018 ,  H01L2924/0002 ,  H01L2924/00

摘要： A beam modulation device gate is constructed from a silicon material, such as a silicon layer on an silicon on insulator wafer. The device further comprises a set of electrical contacts on the layer. The layer defines a set of electrically conducting silicon material fingers forming an array, wherein each of at least some of the fingers is connected electrically to one of the electrical contacts. The gate may be used in a mass or ion mobility spectrometer. Where the gate is constructed from a silicon on insulator wafer, an insulator layer supports the silicon layer and a handle layer supports the insulator layer. When predetermined electrical potentials are applied to the electrical contacts, at least some of the fingers will be substantially at said predetermined electrical potentials to modulate a beam of charged particles that passes through said array of fingers. A plurality of devices of the type above may be used, where each of the devices modulates the beam so that the beam is deflected along a direction different from direction along which the beam is deflected by any of the remaining devices. A plurality of devices of the type above may be used for a mass gate or charged particle buncher device. For making an ion optical device, an array of fingers is formed in a silicon layer of the silicon on insulator wafer. A portion of a handle layer of the wafer on a side of an insulator layer of the wafer opposite to that of the fingers is removed; and a portion of the insulator layer is removed so that the fingers are connected to the wafer only through the silicon layer and at one end of the fingers.

摘要翻译： 光束调制器件栅极由诸如硅绝缘体晶片上的硅层的硅材料构成。 该装置还包括该层上的一组电触点。 该层限定了一组形成阵列的导电硅材料指状物，其中至少一些指状物中的每一个与电触点之一电连接。 栅极可用于质谱或离子迁移谱仪。 在栅极由硅绝缘体晶片构成的情况下，绝缘体层支撑硅层，并且手柄层支撑绝缘体层。 当预定的电势被施加到电触点时，至少一些指状物将基本处于所述预定的电势，以调制穿过所述指状物阵列的带电粒子束。 可以使用上述类型的多个装置，其中每个装置调制光束，使得光束沿着不同于任何剩余装置偏转光束的方向的方向偏转。 上述类型的多个装置可以用于质量门或带电粒子聚束器装置。 为了制造离子光学器件，在硅绝缘体晶片的硅层中形成指状物阵列。 除去晶片的与手指相反的晶片的绝缘体层一侧的手柄层的一部分; 并且去除绝缘体层的一部分，使得指状物仅通过硅层和手指的一端连接到晶片。