公开(公告)号：US20210063242A1

公开(公告)日：2021-03-04

申请号：US17009175

申请日：2020-09-01

申请人： HITACHI HIGH-TECH SCIENCE CORPORATION ,  Inter-University Research Institute Corporation Research Organization of Information and Systems Nat

发明人： Jun HORIGOME ,  Hiroki Okawa ,  Takahiro Tamashima ,  Imari Sato ,  Yinqiang Zheng

IPC分类号： G01J3/44 ,  G01N21/64 ,  G06K9/20 ,  H04N5/225 ,  G06F3/14

摘要： A method of obtaining a quantum efficiency distribution in a predetermined sample surface, including: irradiating a reference material with excitation light belonging to a first wavelength range; obtaining the reference material's image, which includes a first channel for the first wavelength range and a second channel for a second wavelength range, the first and the second channel's irradiation luminance value in each pixel; irradiating the predetermined sample surface with the excitation light; obtaining the first and the second channel's measurement luminance value in each pixel of the image of the predetermined surface; calculating an absorption luminance value from a difference between the first channel's irradiation luminance value and measurement luminance value; calculating a fluorescence luminance value from difference between the second channel's irradiation luminance value and measurement luminance value; calculating quantum efficiency of each pixel based on the values; and obtaining quantum efficiency distribution.