-
公开(公告)号:US20200173044A1
公开(公告)日:2020-06-04
申请号:US16784678
申请日:2020-02-07
申请人: Mitsubishi Chemical Corporation , THE UNIVERSITY OF TOKYO , JAPAN TECHNOLOGICAL RESEARCH ASSOCIATION OF ARTIFICIAlL PHOTOSYNTHETIC CHEMICAL PROCESS , NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
发明人: Hiroshi NISHIYAMA , Tomohiro HIGASHI , Yutaka SASAKI , Taro YAMADA , Kazunari DOMEN , Yohichi SUZUKI , Seiji AKIYAMA
摘要: A method for producing a transparent electrode for oxygen production having a Ta nitride layer on a transparent substrate, including: a step of forming a Ta nitride precursor layer on the transparent substrate; and a step of nitriding the Ta nitride precursor layer with a mixed gas containing ammonia and a carrier gas.