公开(公告)号：US20070119374A1

公开(公告)日：2007-05-31

申请号：US10556949

申请日：2004-05-07

申请人： Alain Villermet ,  Francois Coeuret ,  Jacques Delumeau

发明人： Alain Villermet ,  Francois Coeuret ,  Jacques Delumeau

IPC分类号： C23C16/00

CPC分类号： C23C16/45563 ,  C23C16/545

摘要： The invention relates to equipment for area-based surface treatment of an article by electric dielectric barrier discharge in the presence of a non-atmospheric controlled gaseous mixture, comprising a hollow metal electrode enabling the gaseous mixture to circulate therewithin and the mixture to be transported to a discharge area, whereby said electrode is divided into individual elements which can each be pivoted about a central axis to ensure sufficient distance between the element which is considered as being pivoted and the area of the article opposite the element in question so that the discharge cannot develop; the central pivoting axis is used as a channel for the circulation of the gaseous mixture inside the electrode and is provided with openings enabling the gaseous mixture to be evacuated to the discharge area; pivoting one of the elements of the electrodes blocks up the evacuating opening associated therewith and the gaseous mixture can only be evacuated via the evacuating openings of non-pivoted elements.

摘要翻译： 本发明涉及在非气氛控制气体混合物存在的情况下通过电介质阻挡放电对物品进行面积表面处理的设备，其包括使气体混合物在其中循环的空心金属电极，并将待运输的混合物 放电区域，由此所述电极被分成单独的元件，每个元件可以围绕中心轴线枢转，以确保被认为是枢转的元件与制品的与所述元件相对的区域之间的足够距离，使得放电不能 发展; 中心枢转轴线用作气体混合物在电极内循环的通道，并且设置有使气体混合物能够排出到排放区域的开口; 枢转电极中的一个元件堵住与其相关联的抽空开口，并且气体混合物只能通过非枢转元件的抽空开口抽真空。

公开(公告)号：US07699022B2

公开(公告)日：2010-04-20

申请号：US10556949

申请日：2004-05-07

申请人： Alain Villermet ,  François Coeuret ,  Jacques Delumeau

发明人： Alain Villermet ,  François Coeuret ,  Jacques Delumeau

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/45563 ,  C23C16/545

摘要： The invention relates to equipment for area-based surface treatment of an article by electric dielectric barrier discharge in the presence of a non-atmospheric controlled gaseous mixture, comprising a hollow metal electrode enabling the gaseous mixture to circulate therewithin and the mixture to be transported to a discharge area, whereby said electrode is divided into individual elements which can each be pivoted about a central axis to ensure sufficient distance between the element which is considered as being pivoted and the area of the article opposite the element in question so that the discharge cannot develop; the central pivoting axis is used as a channel for the circulation of the gaseous mixture inside the electrode and is provided with openings enabling the gaseous mixture to be evacuated to the discharge area; pivoting one of the elements of the electrodes blocks up the evacuating opening associated therewith and the gaseous mixture can only be evacuated via the evacuating openings of non-pivoted elements.

摘要翻译： 本发明涉及在非气氛控制气体混合物存在的情况下通过电介质阻挡放电对物品进行面积表面处理的设备，其包括使气体混合物在其中循环的空心金属电极，并将待运输的混合物 放电区域，由此所述电极被分成单独的元件，每个元件可以围绕中心轴线枢转，以确保被认为是枢转的元件与制品的与所述元件相对的区域之间的足够距离，使得放电不能 发展; 中心枢转轴线用作气体混合物在电极内循环的通道，并且设置有使气体混合物能够排出到排放区域的开口; 枢转电极中的一个元件堵住与其相关联的抽空开口，并且气体混合物只能通过非枢转元件的抽空开口抽真空。