公开(公告)号：US5792226A

公开(公告)日：1998-08-11

申请号：US752385

申请日：1996-11-20

申请人： Joung-sun Lee ,  Jae-jun Ruy ,  Kun-hyung Lee ,  Sang-young Mun

发明人： Joung-sun Lee ,  Jae-jun Ruy ,  Kun-hyung Lee ,  Sang-young Mun

IPC分类号： F24F7/06 ,  F24F3/16 ,  F24F13/075 ,  H01L21/00 ,  B01D46/10 ,  B01L1/04

CPC分类号： F24F3/161

摘要： An air current controlling device for a clean room having a high efficiency particle filter, a housing cap for the filter, and an air current directional controller provided between the filter and the housing cap. The controller has a shaft extending therefrom, which extends through a central opening in the bottom of the housing cap. The controller includes a plurality of extendable and retractable blades, each being connected to a square plate that is in turn connected to the shaft. A clean room having the above air current controlling device installed in each air inlet is capable of widely distributing the clean air in the clean room. The wide air distribution reduces the temperature difference in the clean room, while optimizing the relative humidity and thereby reducing the electrostatic level of the clean room.

摘要翻译： 一种用于洁净室的气流控制装置，其具有高效率粒子滤波器，用于过滤器的壳体盖，以及设置在过滤器和壳体盖之间的气流定向控制器。 控制器具有从其延伸的轴，其延伸穿过壳体盖的底部中的中心开口。 控制器包括多个可伸缩和可缩回的叶片，每个叶片连接到正方形板，该方板又连接到轴上。 具有安装在每个空气入口中的上述气流控制装置的洁净室能够将清洁空气广泛地分布在洁净室中。 广泛的空气分布降低了洁净室中的温差，同时优化了相对湿度，从而降低了洁净室的静电电平。