Method of Repairing Micromirrors in Spatial Light Modulators
    1.
    发明申请
    Method of Repairing Micromirrors in Spatial Light Modulators 审中-公开
    空间光调制器中微镜修复方法

    公开(公告)号:US20080218842A1

    公开(公告)日:2008-09-11

    申请号:US12103333

    申请日:2008-04-15

    CPC classification number: G02B26/0841

    Abstract: Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

    Abstract translation: 这里公开的是操作包括微镜阵列的装置的方法。 该方法包括可用于在操作期间修复微镜阵列的粘性微镜的过程。 修复过程在ON状态下,对阵列中的微镜的镜板施加两个连续的刷新电压,其中脉冲在时间上比微镜的特征振荡时间长。 修复过程可独立应用于微镜。 或者,修复过程可以结合偏置反转过程。

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