公开(公告)号：US06855916B1

公开(公告)日：2005-02-15

申请号：US10732161

申请日：2003-12-10

Applicant: Brian Matthews ,  James R. Willis ,  Paul E. Lustiber

Inventor： Brian Matthews ,  James R. Willis ,  Paul E. Lustiber

IPC: F27B17/00 ,  F27D19/00 ,  H01L21/00 ,  F27B5/14

CPC classification number: H01L21/67248 ,  F27B17/0025 ,  F27D19/00 ,  H01L21/67109

Abstract: A method for thermally processing a substrate provides a target substrate temperature and generates a move profile of the substrate within a thermal processing system. An amount of heat is provided to the substrate, and one or more temperatures associated with one or more respective locations on the substrate are measured. A predicted temperature profile is further generated, wherein a predicted temperature of the substrate is based on the amount of heat provided and the one or more measured temperatures. The amount of heat provided to the substrate is further regulated, based on the predicted temperature profile, wherein the substrate is thermally processed generally according to the intended substrate temperature profile. The amount of heat provided to the substrate can be further regulated by controlling a position of the substrate within the thermal processing system.

Abstract translation: 用于热处理衬底的方法提供目标衬底温度并且在热处理系统内产生衬底的移动分布。 向衬底提供一定量的热量，并且测量与衬底上的一个或多个相应位置相关联的一个或多个温度。 进一步产生预测温度曲线，其中基板的预测温度基于所提供的热量和一个或多个测量温度。 基于预测的温度曲线，进一步调节提供​​给基板的热量，其中基板通常根据预期的基板温度曲线热加工。 通过控制热处理系统内的基板的位置，可以进一步调节提供​​给基板的热量。

公开(公告)号：US5870841A

公开(公告)日：1999-02-16

申请号：US856554

申请日：1997-05-15

Applicant: William M. Brody, II ,  James R. Willis

Inventor： William M. Brody, II ,  James R. Willis

IPC: B60R13/10 ,  G09F7/00

CPC classification number: B60R13/105

Abstract: A license plate holder provided with a flat backing plate to which a transparent cover is hinged at the base thereof and which may be readily removable from the backing plate at the top thereof.

Abstract translation: 一种牌照持有器，其具有平的背板，透明盖在其底部铰接到该平板背板上，并且可在其顶部容易地从背板移除。