Method and apparatus for identifying line-end features for lithography verification
    1.
    发明授权
    Method and apparatus for identifying line-end features for lithography verification 有权
    用于识别光刻验证的线端特征的方法和装置

    公开(公告)号:US07194712B2

    公开(公告)日:2007-03-20

    申请号:US10845566

    申请日:2004-05-12

    申请人: James Xiaqing Wu

    发明人: James Xiaqing Wu

    IPC分类号: G06F17/50

    CPC分类号: G06F17/5081

    摘要: One embodiment of the invention provides a system that facilitates identifying line-end features in a layout for an integrated circuit. The system operates by first receiving the layout for the integrated circuit. Next, the system selects a polygon from the layout and marks a line-end seed on the polygon. The system then determines if the line-end seed is associated with a line feature, and if so, the system marks the line-end feature inside the line feature.

    摘要翻译: 本发明的一个实施例提供一种有助于识别用于集成电路的布局中的线路端部特征的系统。 该系统首先接收集成电路的布局。 接下来,系统从布局中选择一个多边形,并在多边形上标记一个线端种子。 系统然后确定线端种子是否与线要素相关联,如果是,则系统标记线特征内的线端特征。

    Method and apparatus for identifying line-end features for lithography verification
    2.
    发明申请
    Method and apparatus for identifying line-end features for lithography verification 有权
    用于识别光刻验证的线端特征的方法和装置

    公开(公告)号:US20050257181A1

    公开(公告)日:2005-11-17

    申请号:US10845566

    申请日:2004-05-12

    申请人: James Xiaqing Wu

    发明人: James Xiaqing Wu

    IPC分类号: G06F17/50

    CPC分类号: G06F17/5081

    摘要: One embodiment of the invention provides a system that facilitates identifying line-end features in a layout for an integrated circuit. The system operates by first receiving the layout for the integrated circuit. Next, the system selects a polygon from the layout and marks a line-end seed on the polygon. The system then determines if the line-end seed is associated with a line feature, and if so, the system marks the line-end feature inside the line feature.

    摘要翻译: 本发明的一个实施例提供一种有助于识别用于集成电路的布局中的线路端部特征的系统。 该系统首先接收集成电路的布局。 接下来,系统从布局中选择一个多边形,并在多边形上标记一个线端种子。 系统然后确定线端种子是否与线要素相关联,如果是,则系统标记线特征内的线端特征。