公开(公告)号：US07615985B2

公开(公告)日：2009-11-10

申请号：US11663129

申请日：2005-09-15

申请人： Sébastien Dine ,  Jacques Jolly ,  Jean Bernard Pierre Larour

发明人： Sébastien Dine ,  Jacques Jolly ,  Jean Bernard Pierre Larour

IPC分类号： G01R31/02 ,  G01R1/06

CPC分类号： H05H1/0081

摘要： A probe for measuring electrical characteristics of an excitation current of a plasma is provided. The probe is mounted on a conductive line that includes an inner conductor and an outer conductor. The probe includes a current sensor and a voltage sensor. The current sensor includes a groove formed in the ground of one of the conductors in order to form a detour for the current flowing through the conductor, and a point for measuring electric voltage between a ground connected to the conductor and a point of the groove. The current sensor thus is able to measure a voltage proportional to the first time derivative of intensity (Iplasma) of the excitation current. The voltage sensor is a shunt sensor capable of measuring a voltage proportional to the first time derivative of the voltage (Vplasma) of the excitation current. A plasma reactor including a probe of the aforementioned type is also provided.

摘要翻译： 提供了用于测量等离子体的激励电流的电特性的探针。 探针安装在包括内导体和外导体的导线上。 探头包括电流传感器和电压传感器。 电流传感器包括形成在一个导体的接地中的沟槽，以形成流过导体的电流的绕行，以及用于测量连接到导体的接地与沟槽的点之间的电压的点。 因此，电流传感器能够测量与激励电流的强度（Iplasma）的第一时间导数成比例的电压。 电压传感器是能够测量与激励电流的电压（Vplasma）的第一次导数成比例的电压的分流传感器。 还提供了包括上述类型的探针的等离子体反应器。