公开(公告)号：US20070210393A1

公开(公告)日：2007-09-13

申请号：US11547774

申请日：2004-04-08

申请人： Jean-Luc Rehspringer ,  Laurent Bedel

发明人： Jean-Luc Rehspringer ,  Laurent Bedel

IPC分类号： H01L21/02 ,  G03F7/004 ,  H01L29/66

CPC分类号： G03F7/0042 ,  G03F7/0043 ,  G03F7/0047 ,  H01L21/288 ,  H01L21/76838 ,  H05K1/0306 ,  H05K3/02 ,  H05K3/105 ,  H05K2203/107 ,  H05K2203/121

摘要： A lithographic method, products obtained thereby and use of the method, in particular, in the production of micro- or nano-metric products or objects. The method includes the steps of deposition of a film of an organometallic solution of a substrate, containing at least one metal ion as precursor(s) for marking the substrate, local exposure, according to the required pattern, of the obtained film, via at least one focussed energetic beam, with an energy density sufficient to at least locally dry the film, dissolution of the non-exposed zone, the at least dried zones remaining on the substrate, optionally subjecting the obtained product to a thermal treatment and, where necessary, repetition of certain steps, with optional change to the organometallic solution, until the required final product is obtained.

摘要翻译： 平版印刷方法，由此获得的产品和该方法的使用，特别是在生产微米或纳米级产品或物体中。 该方法包括以下步骤：沉积基材的有机金属溶液的膜，其含有至少一种金属离子作为用于标记基材的前体，根据所需的图案，通过在 至少一个聚焦的能量束，其能量密度足以至少局部地干燥膜，非暴露区域的溶解，残留在基材上的至少干燥区域，任选地使得到的产物经受热处理，并且在必要时 重复某些步骤，随机选择改变有机金属溶液，直到获得所需的最终产品。

公开(公告)号：US4888314A

公开(公告)日：1989-12-19

申请号：US884538

申请日：1986-07-11

申请人： Jean-Claude Bernier ,  Paul J. L. Poix ,  Jean-Luc Rehspringer ,  Gabriel G. J. Vilmin ,  Serge Vilminot

发明人： Jean-Claude Bernier ,  Paul J. L. Poix ,  Jean-Luc Rehspringer ,  Gabriel G. J. Vilmin ,  Serge Vilminot

IPC分类号： C01B33/26 ,  C04B35/195 ,  H01G4/12 ,  H01L21/48 ,  H01L23/15

CPC分类号： H01L21/4807 ,  C01B33/26 ,  C04B35/195 ,  H01G4/1209 ,  H01L23/15 ,  H01L2924/0002 ,  H01L2924/09701

摘要： The present invention relates to a cordierite (2MgO.2Al.sub.2 O.sub.3.5SiO.sub.2) type ceramic powder sintering at low-temperature defined in that its composition is: 60 to 50% SiO.sub.2, 5 to 20% MgO and 20 to 40% Al.sub.2 O.sub.3, and in that its specific surface area is not less than 50 m.sup.2 /g, this powder having a fritting temperature of less than 1,100.degree. C.The invention also relates to a process for the preparation of this powder, which consists in preparing a mixed alcoholic solution of an aluminum and silicon salt, in preparing a solution of an alcohol-soluble magnesium salt, in mixing the two solutions, in padding a hydrolyzing agent in the form of a totally volatile weak base to the solution, which leads to the formation of a gel, in subjecting the said gel to a first thermal treatment at a temperature not exceeding 450.degree. C., and in subjecting the said powder to a second thermal treatment at a temperature of between 450.degree. C. and 900.degree. C.By a sintering which may be carried out at a temperature lower than 950.degree. C., the powder obtained leads to dielectric ceramics which have a coefficient of expansion less than 1.10.sup.-6 C.sup.-1, and a dielectric constant less than 5.

摘要翻译： 本发明涉及在低温下烧结的堇青石（2MgO.2Al2O3.5SiO2）型陶瓷粉末，其特征在于其组成为：60至50％的SiO 2，5至20％的MgO和20至40％的Al 2 O 3，其中 其比表面积不小于50m 2 / g，该粉末的烧结温度低于1100℃。本发明还涉及一种制备该粉末的方法，该方法包括制备混合的醇溶液 铝和硅盐，在制备醇可溶性镁盐溶液时，将两种溶液混合，将完全挥发性弱碱形式的水解剂填充到溶液中，导致形成凝胶， 在不超过450℃的温度下对所述凝胶进行第一次热处理，并在450℃至900℃的温度下对所述粉末进行第二次热处理。通过烧结可以 在较低的温度下进行 在950℃下，得到的粉末导致膨胀系数小于1.10-6C-1，介电常数小于5的介电陶瓷。