Liquid metal ion source
    1.
    发明授权
    Liquid metal ion source 失效
    液态金属离子源

    公开(公告)号:US4318030A

    公开(公告)日:1982-03-02

    申请号:US148852

    申请日:1980-05-12

    申请人: Jerg B. Jergenson

    发明人: Jerg B. Jergenson

    IPC分类号: H01J27/26 H01J27/02

    CPC分类号: H01J27/26

    摘要: Liquid metal ion source has cylindrical ceramic body 12 engaged by one leg of hook shaped strip heater 20 which is held in place by ceramic bushing 24. Apex 18 of the strip heater contains the ion source fuel metal and is pierced by needle 22 having sharp tip 30. Upon heating by heater current flow through needle 22 and heater leg 14 and electrical bias with an extraction electrode, tip 30 emits ions.

    摘要翻译: 液体金属离子源具有圆柱形陶瓷体12,该圆柱形陶瓷体12由钩形条加热器20的一条腿接合,钩状加热器20由陶瓷衬套24保持就位。带状加热器的尖端18包含离子源燃料金属,并且被具有尖锐尖端的针22刺穿 在通过加热器电流通过针22和加热器支腿14进行加热并用提取电极进行电偏压时,尖端30发射离子。

    Preparation of liquid metal source structures for use in ion beam
evaporation of boron-containing alloys
    2.
    发明授权
    Preparation of liquid metal source structures for use in ion beam evaporation of boron-containing alloys 失效
    用于含硼合金离子束蒸发的液态金属源结构的制备

    公开(公告)号:US4617203A

    公开(公告)日:1986-10-14

    申请号:US721336

    申请日:1985-04-08

    申请人: Jerg B. Jergenson

    发明人: Jerg B. Jergenson

    CPC分类号: H01J27/26 H01J27/022

    摘要: A process for preparing a liquid metal ion source structure, preferably made from graphite, so that it may be wetted with boron-containing alloys. The process first involves the coating the source structure with elemental boron. The boron is preferably furnished as boron powder in a liquid carrier which may then be coated onto the surface of the source structure substrate. The coated structure is heated for a short time to a temperature whereat the source structure substrate and boron form a liquid layer at the surface of the substrate to "boronize" the substrate. The final wetted source structure is achieved by mixing a small amount of free boron powder with the alloy to be ion evaporated (also in powdered form), coating the previously boronized source structure with this mixture and heating the contacted boron-augmented source alloy and source structure to a temperature of at least the solidus temperature of the source alloy, at which point the source structure is wetted. Once wetted, a flow of source alloy toward the emitter tip of the source structure can be established during operation of the ion source. Prior boronizing may be omitted for some boron carbide source structures.

    摘要翻译: 一种制备液体金属离子源结构的方法,优选由石墨制成,以便可以用含硼合金润湿。 该方法首先涉及用元素硼涂覆源结构。 硼优选以液体载体中的硼粉末形式提供,然后可将其涂覆在源结构基材的表面上。 将涂覆结构加热短时间至其中源结构基底和硼在基底表面处形成液体层以使基底“硼化”的温度。 最终的润湿源结构是通过将少量游离硼粉末与要离子蒸发的合金(也以粉末形式)混合,用该混合物涂覆先前硼化的源结构并加热接触的硼增强源合金和源 结构至少为源合金的固相线温度,此时源结构被润湿。 一旦润湿,可以在离子源的操作期间建立朝向源结构的发射极尖端的源合金流。 某些碳化硼源结构可能会省略硼化。

    Shielded counter-rotating spinner assembly for microparticalization of
liquid
    3.
    发明授权
    Shielded counter-rotating spinner assembly for microparticalization of liquid 失效
    用于液体微粒化的屏蔽反向旋转旋转器组件

    公开(公告)号:US5018954A

    公开(公告)日:1991-05-28

    申请号:US509213

    申请日:1990-04-16

    申请人: Jerg B. Jergenson

    发明人: Jerg B. Jergenson

    IPC分类号: B05B3/10

    摘要: The preferred embodiment of the shielded counter-rotating spinner assembly for microparticalization of liquid consists of two opposed, coaxial, counter-rotating, conical, sharp-edged spinners whose edges are in close proximity and whose outer surfaces are in close proximity with non-rotating shields which extend to the edges of the spinners. The purpose of the shields is to greatly reduce the spinner induced air drafts so that, when liquids are applied to the inside surfaces of the spinners through the axes of the driving motors, the droplets produced on the edges of the spinners are injected into very low velocity air. The benefits of accomplishing this are the realization of very short droplet trajectories, the concomitant reduction in size of a plenum chamber which might encompass the device, the production of dense fogs of liquid droplets, and the ability to efficiently mix a liquid with a gas or to mix binary liquid chemicals together away from the device, but within a restricted volume where the atmosphere may be controlled and the production of solid droplets from the liquid phase through cooling in a finite volume and within a controlled atmosphere.

    摘要翻译: 用于液体微粒化的屏蔽反向旋转旋转器组件的优选实施例由两个相对的,同轴的,反向旋转的圆锥形尖锐的旋转器组成,其边缘紧密接近,并且其外表面非接近于非旋转 护罩延伸到纺纱机的边缘。 屏蔽件的目的是大大减少旋转器引起的空气通风,使得当通过驱动电机的轴线将液体施加到旋转器的内表面时,在旋转器的边缘上产生的液滴被注入非常低 速度空气 实现这一点的好处是实现非常短的液滴轨迹,伴随减小可能包含装置的增压室的尺寸,产生浓雾的液滴,以及将液体与气体混合的能力,或 将二元液体化学品混合在一起远离装置,但在限制的体积内可以控制气氛,并且通过在有限体积和受控气氛中的冷却从液相产生固体液滴。

    Liquid metal ion source
    4.
    发明授权
    Liquid metal ion source 失效
    液态金属离子源

    公开(公告)号:US4638210A

    公开(公告)日:1987-01-20

    申请号:US720470

    申请日:1985-04-05

    申请人: Jerg B. Jergenson

    发明人: Jerg B. Jergenson

    IPC分类号: H01J27/26 H01J1/00

    CPC分类号: H01J27/26

    摘要: Billet (52) of electrically conductive or semi-conductive material has slot (54) therethrough which contains insulator slip (58). In this condition, the ion emitter body (44) is machined with the cylindrical exterior surface (60), conical nose (62) and emitter point (70). The limited electrical path localizes heating under the point (70) and the strong structure of the body permits strong mounting and controlled heat extraction.

    摘要翻译: 导电或半导体材料的薄坯(52)具有穿过其中的槽(54),其中包含绝缘体滑块(58)。 在这种情况下,离子发射体(44)被加工成具有圆柱形外表面(60),锥形鼻(62)和发射极点(70)。 有限的电气路径使得点(70)下的加热定位,并且机体的坚固结构允许强烈的安装和受控的热提取。

    Liquid metal ion source
    5.
    发明授权
    Liquid metal ion source 失效
    液态金属离子源

    公开(公告)号:US4752692A

    公开(公告)日:1988-06-21

    申请号:US727701

    申请日:1985-04-26

    IPC分类号: H01J27/26 H01J27/02

    CPC分类号: H01J27/26

    摘要: U-shaped billet (52) has a slot (54) cut therein for receipt of a slip of insulator material (56). This body is machined on its front end (64) to produce a narrow bridge (66) of controlled cross-sectional area. Emitter needle (78) is positioned in a bore through the bridge to be heated by current through the bridge. The ion emitter body is rigid and strong to hold the emitter needle in the proper location.

    摘要翻译: U形坯料(52)具有在其中切割的槽(54),用于接收绝缘体材料(56)的滑移。 该主体在其前端(64)上加工,以产生受控横截面积的窄桥(66)。 发射器针(78)定位在穿过桥的孔中,以通过电流通过桥被加热。 离子发射体是刚性和坚固的,以将发射针保持在适当的位置。

    Liquid metal ion source
    6.
    发明授权
    Liquid metal ion source 失效
    液态金属离子源

    公开(公告)号:US4318029A

    公开(公告)日:1982-03-02

    申请号:US148851

    申请日:1980-05-12

    申请人: Jerg B. Jergenson

    发明人: Jerg B. Jergenson

    IPC分类号: H01J27/26 H01J27/02

    CPC分类号: H01J27/26

    摘要: Liquid metal ion source has cylindrical ceramic tube 12 embraced by strip heater 20 which is held in place by ceramic bushing 26. Apex 28 of the strip heater contains the ion source fuel metal and is pierced by needle 34 having sharp tip 36. Upon heating and electrical bias with respect to a coaxial extraction electrode, tip 36 emits ions.

    摘要翻译: 液体金属离子源具有圆柱形陶瓷管12,其带状加热器20被带状陶瓷衬套26保持就位。带状加热器的尖端28包含离子源燃料金属,并被具有尖锐尖端36的针34刺穿。加热和 相对于同轴引出电极的电偏压,尖端36发射离子。