公开(公告)号：US07297055B2

公开(公告)日：2007-11-20

申请号：US10802064

申请日：2004-03-16

Applicant: David R. Sar ,  Jerry D. Withrow

Inventor： David R. Sar ,  Jerry D. Withrow

IPC: B01D8/00

CPC classification number: F17C3/08 ,  F17C3/085 ,  F17C2201/0104 ,  F17C2201/0133 ,  F17C2201/032 ,  F17C2201/056 ,  F17C2203/0391 ,  F17C2203/0617 ,  F17C2221/013 ,  F17C2221/05 ,  F17C2223/0192 ,  F17C2223/033 ,  F17C2223/043 ,  F17C2227/0353 ,  F17C2227/0369 ,  F17C2227/045 ,  F17C2250/032 ,  F17C2260/044 ,  F17C2270/05 ,  F17C2270/0527 ,  F17C2270/0536 ,  H01F6/04 ,  Y10S417/901

Abstract: A method of generating a high-level vacuum comprises evacuating a chamber having a substantially-pure gas therein to a medium-level vacuum, and freezing the residual gas to generate the high-level vacuum within the chamber. Impurities, such as atmospheric air, may be purged from the chamber by evacuating the chamber to a medium level vacuum (e.g., around 10−2 Torr) and subsequently filling the chamber with the gas. This purging process may be repeated multiple times to decrease the level of impurities in the gas filling the chamber. The substantially-pure gas may have an impurity-level of less than approximately 100 PPM and may comprise carbon-dioxide, although the scope of the invention is not limited in this respect. The medium level vacuum may range between approximately 1×10−2 Torr and 5×10−2 Torr allowing the use of a roughing pump, and the high-level vacuum may range between approximately 1×10−5 and 1×10−8 Torr.

Abstract translation: 产生高级真空的方法包括将其中具有基本上纯净的气体的室抽真空至中等水平的真空，并冷凝残余气体以在室内产生高级真空。 可以通过将室抽真空至中等水平的真空（例如约10 -2乇）并随后用气体填充室来将杂质（例如大气）排出室。 该吹扫过程可以重复多次以降低填充室的气体中的杂质水平。 基本纯净的气体可以具有小于约100PPM的杂质含量，并且可以包含二氧化碳，尽管本发明的范围不限于此。 介质级真空可以在约1×10 -2 Torr和5×10 -2 Torr之间的范围内，允许使用粗抽泵，并且高级真空可以在约1×10 3 -5和1×10 -8乇。