公开(公告)号：US20110318260A1

公开(公告)日：2011-12-29

申请号：US12915902

申请日：2010-10-29

申请人： Jiarong Zhan ,  Guang Yang ,  Jianbo Tang

发明人： Jiarong Zhan ,  Guang Yang ,  Jianbo Tang

IPC分类号： C01B17/76

CPC分类号： C01B17/7655 ,  C01B17/90

摘要： The present invention provides a method of manufacturing ultra-pure sulfuric acid. Industrial sulfur trioxide is used as the raw material, gasifying it in a round gasifier, getting it gasified for the second time after condensation, sulfur trioxide gas has been purified. Absorbing the sulfur trioxide gas with the dilute sulfuric acid circularly, collect the target product of ultra-pure sulfuric acid. The main content of the ultra-pure sulfuric acid obtained by the method of the present invention can reach more than 96 wt %, the content of the impurities of metal ions is in conformity with the SEMI C12 standard. Furthermore, secondary gasification is applied in the present invention to improve the purity of sulfur trioxide, the purified sulfur trioxide was absorbed by dilute sulfuric acid with different concentration circularly, and overcome the shortcomings, such as the unstable quality of the product which produced in the traditional production methods, the high content of the impurities of metal ions, high energy consumption, high cost and easy to cause pollution, so this invention is more suitable for large-scale continuous production.

摘要翻译： 本发明提供一种制造超纯硫酸的方法。 使用工业三氧化硫作为原料，在圆形气化炉中气化，冷凝后第二次气化，三氧化硫气体被净化。 用稀硫酸循环吸收三氧化硫气体，收集超纯硫酸的目标产物。 通过本发明方法获得的超纯硫酸的主要成分可达96重量％以上，金属离子的杂质含量符合SEMI C12标准。 此外，在本发明中应用二次气化以提高三氧化硫的纯度，纯化的三氧化硫被循环的不同浓度的稀硫酸吸收，克服了以下缺点：产物的质量不稳定 传统的生产方式，金属离子杂质含量高，能耗高，成本高，易造成污染，因此本发明更适合大规模连续生产。