摘要:
A technique of utilizing a sulfuric acid/peroxide liquid mixture, for example, its waste liquid material, is to be developed so that the waste liquid can be re-utilized and effectively applied to obviate the problem resulting from disposal. To this end, there is provided a method for utilizing a sulfuric acid/peroxide liquid mixture, for example, its waste liquid, in which peroxide in the sulfuric acid/peroxide liquid mixture is decomposed to render it possible to utilize the liquid mixture as sulfuric acid.
摘要:
The invention relates to a novel method for producing high-purity sulfuric acid for use in the semiconductor industry. The method comprises the addition of a hydrogen peroxide solution to an engineered oelum in order to reduce the SO2 concentration, evaporation of the SO3 and separation of acid traces. The high-purity SO3 is then enriched with inert gas and the SO3 is absorbed into sulfuric acid.
摘要:
A process for purifying a sulfuric acid solution such as by cooling a sulfuric acid solution to at or near its freezing point to form a slurry of a solid phase and a liquid phase. The slurry has an acid-rich region and an acid-poor region. The acid-rich region is separated from the acid-poor region on the basis of density.
摘要:
A PVDF membrane exposed to a quarternary ammonium hydroxide solution retains it hydrophobicity and resistance to corrosive environments, yet spontaneously and completely wets with concentrated sulfuric and nitric acids. The modified membrane is incorporated into filtration devices that are in situ integrity testable in concentrated inorganic mineral acids.
摘要:
An apparatus and method for reprocessing waste piranha containing contaminated H.sub.2 SO.sub.4 from, for example, a semiconductor processing operation is described. The apparatus and method include a first distillation flask which is maintained under a substantial vacuum. The first distillation flask includes a first column packed with a column packing material and an input pipe for refluxing to retard loss of H.sub.2 SO.sub.4 in the first distillation. The second distillation flask boils off substantially pure H.sub.2 SO.sub.4 and provides for a continuous automatic purge of the contaminants from the second distillation flask thus improving the purity of the H.sub.2 SO.sub.4. The substantially pure H.sub.2 SO.sub.4 flows through a column which is coupled to a condenser which condenses substantially pure H.sub.2 SO.sub.4.
摘要翻译:描述了一种用于从例如半导体处理操作中再处理含有污染的H 2 SO 4的废弃食人鱼的设备和方法。 该装置和方法包括保持在基本上真空下的第一蒸馏烧瓶。 第一蒸馏瓶包括填充有柱填料的第一塔和用于回流以延迟第一蒸馏中H 2 SO 4的损失的输入管。 第二蒸馏瓶烧掉基本上纯的H 2 SO 4并提供从第二蒸馏瓶连续自动清除污染物,从而提高H 2 SO 4的纯度。 基本上纯的H 2 SO 4流过与冷凝器相连的塔,该冷凝器冷凝基本上纯的H 2 SO 4。
摘要:
An apparatus and method for reprocessing waste oxidant solution containing contaminated H.sub.2 SO.sub.4 from, for example, a semiconductor processing operation to supply reprocessed ultrapure H.sub.2 SO.sub.4 and ozone is described. The apparatus and method include a two distillation flasks which are maintained under a substantial vacuum. The first distillation flask includes a first column with a column packing means and a reflux means to retard loss of H.sub.2 SO.sub.4 in the first distillation. The second distillation flask boils off substantially pure H.sub.2 SO.sub.4 through a column which is coupled to a condenser which condenses substantially pure H.sub.2 SO.sub.4. The apparatus and method further include an ozone generator and ozone addition module to saturate the substantially pure H.sub.2 SO.sub.4 with ozone to provide an oxidant solution for the semiconductor processing operation. The apparatus and method further includes an ozone destruction unit which destroys the ozone in the waste oxidant solution that is removed from the semiconductor processing operation.
摘要翻译:描述了一种用于再处理含有受污染的H 2 SO 4的废氧化剂溶液的设备和方法,例如从提供再加工的超纯H2SO4和臭氧的半导体加工操作。 该装置和方法包括保持在基本真空下的两个蒸馏瓶。 第一蒸馏瓶包括具有柱填充装置的第一塔和用于在第一蒸馏中延迟H 2 SO 4的损失的回流装置。 第二蒸馏瓶通过与冷凝器相连的柱子将基本上纯的H 2 SO 4烧掉,冷凝器冷凝基本上纯的H 2 SO 4。 该装置和方法还包括臭氧发生器和臭氧添加模块,用臭氧使基本上纯的H 2 SO 4饱和,以提供用于半导体加工操作的氧化剂溶液。 该装置和方法还包括臭氧破坏单元,其破坏从半导体处理操作中去除的废氧化剂溶液中的臭氧。
摘要:
PROCESS FOR THE PURIFICATION OF SULFIRIC ACID TO BE USED IN THE MANUFACTURE OF HYDROXYLAMMONIUM SULFATE BY REDUCTION OF NITRIC OXIDE IN CONTACT WITH PLATNIUM CATALYSTS. THE PROCESS CONSISTS IN DILUTING THE SULFURIC ACID WITH WATER, ADDING SUCH AN AMOUNT OF SULFUR DIOXIDE THAT AFTER TREATMENT WITH ACTIVATED CARBON IN STILL HAS A CONTENT OF AT LEAST 5 MG. OF SO2 PER LITER OF DILUTE ACID AND THEN TREATING THE SULFURIC ACID TOGETHER WITH AIR, OXYGEN OR HYDROGEN PEROXIDE AGAIN WITH ACTIVATED CARBON. THE ACTIVATED CARBON CAN BE REGENERATED BY TREATMENT WITH ALKALINE SUBSTANCES SUCH AS CAUSTIC SODA SOLUTION, AQUEOUS AMMONIA SOLUTION OR SODIUM CARBONATE SOLUTION.