公开(公告)号：US20130044360A1

公开(公告)日：2013-02-21

申请号：US13213360

申请日：2011-08-19

Applicant: Stefan HEINEMANN ,  Wolfgang RETSCHKE ,  Holger WAGNER ,  Jonas BURGHOFF ,  Abraham GROSS

Inventor： Stefan HEINEMANN ,  Wolfgang RETSCHKE ,  Holger WAGNER ,  Jonas BURGHOFF ,  Abraham GROSS

IPC: G02B26/10

CPC classification number: G02F1/11 ,  G02B26/124 ,  G02B27/0955 ,  G02B27/30 ,  H04N1/04 ,  H04N1/0408 ,  H04N1/0443

Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.

公开(公告)号：US08531751B2

公开(公告)日：2013-09-10

申请号：US13213360

申请日：2011-08-19

Applicant: Stefan Heinemann ,  Wolfgang Retschke ,  Holger Wagner ,  Jonas Burghoff ,  Abraham Gross

Inventor： Stefan Heinemann ,  Wolfgang Retschke ,  Holger Wagner ,  Jonas Burghoff ,  Abraham Gross

IPC: G02B26/08

CPC classification number: G02F1/11 ,  G02B26/124 ,  G02B27/0955 ,  G02B27/30 ,  H04N1/04 ,  H04N1/0408 ,  H04N1/0443

Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.