公开(公告)号：US6063455A

公开(公告)日：2000-05-16

申请号：US731059

申请日：1996-10-09

申请人： Hyo Soo Jeong ,  Han Kim ,  Jung Ok Choi ,  Moung Jae Kim

发明人： Hyo Soo Jeong ,  Han Kim ,  Jung Ok Choi ,  Moung Jae Kim

IPC分类号： C23C14/06 ,  C23C14/28 ,  C23C14/00

CPC分类号： C23C14/0611 ,  C23C14/28

摘要： The present invention relates to an apparatus for manufacturing a diamond film having a large area which is used for a field emission display (FED) and a manufacturing method thereof.The apparatus for manufacturing a diamond film having a large area according to the present invention comprises a pulse laser generating system for generating a pulse laser beam, a laser beam scanner for scanning said pulse laser beam, and a vacuum chamber which includes a target and a substrate holder, wherein said laser beam having passed said laser beam scanner is irradiated on said target, and wherein a substrate on which a diamond film is to be formed by a plume produced from said target is set up to said substrate holder. The diamond film according to the present invention has a uniform electrical and mechanical properties and can be obtained in a short time period and with a uniform width and a large area. The diamond film manufactured according to the present invention can be also used for manufacturing emitters for FED having a large area and can increase the efficiency of the target because of the possibility of using the overall area thereof.

摘要翻译： 本发明涉及用于场发射显示（FED）的面积大的金刚石膜的制造装置及其制造方法。 根据本发明的用于制造具有大面积的金刚石膜的设备包括用于产生脉冲激光束的脉冲激光产生系统，用于扫描所述脉冲激光束的激光束扫描器和包括靶和 衬底保持器，其中通过所述激光束扫描器的所述激光束被照射在所述靶上，并且其中将由所述靶产生的羽流形成金刚石膜的衬底设置到所述衬底保持器。 根据本发明的金刚石膜具有均匀的电气和机械性能，并且可以在短时间内获得并且具有均匀的宽度和大的面积。 根据本发明制造的金刚石膜也可用于制造具有大面积的FED的发射体，并且由于可能使用其整个面积而能够提高靶的效率。