公开(公告)号：US20130008603A1

公开(公告)日：2013-01-10

申请号：US13422366

申请日：2012-03-16

申请人： Hideo Eto ,  Nobuyasu Nishiyama ,  Makoto Saito ,  Junko Ouchi

发明人： Hideo Eto ,  Nobuyasu Nishiyama ,  Makoto Saito ,  Junko Ouchi

IPC分类号： H01B11/18 ,  C23C16/52 ,  C23C16/509 ,  B44C1/22 ,  H05H1/24

CPC分类号： H01J37/32577 ,  H01B11/1856 ,  H01B11/1882

摘要： According to one embodiment, there is provided a coaxial cable that transmits radio frequency power. The coaxial cable includes an inner tube, an outer tube, and an insulating support member. The inner tube is made of a conductor. The outer tube is disposed outside the inner tube coaxially with the inner tube and is made of a conductor. The insulating support member is disposed between the inner tube and the outer tube. Cooling gas flows into at least one of a first space inside the inner tube and a second space between the inner tube and the outer tube.

摘要翻译： 根据一个实施例，提供了一种传输射频功率的同轴电缆。 同轴电缆包括内管，外管和绝缘支撑构件。 内管由导体制成。 外管与内管同轴配置在内管的外侧，由导体构成。 绝缘支撑构件设置在内管和外管之间。 冷却气体流入内管内的第一空间和内管与外管之间的第二空间中的至少一个。