公开(公告)号：US20130108409A1

公开(公告)日：2013-05-02

申请号：US13807920

申请日：2011-07-05

申请人： Kung Chris Wu ,  Jing Wen ,  Ruiqiu Yang ,  Junqiang Zheng

发明人： Kung Chris Wu ,  Jing Wen ,  Ruiqiu Yang ,  Junqiang Zheng

IPC分类号： B25J15/06

CPC分类号： B25J15/0616 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/6838

摘要： An end effector (20, 20′) for simultaneously transferring a batch of substrates (202). The end effector (20, 20′) includes a set of juxtaposed substrate grippers (22, 22′) having a pitch between pairs of grippers (22, 22″) that does not exceed six (6.00) mm. Each gripper (22, 22′) has a contact surface (54, 54′) against which a substrate (202) becomes clamped upon injecting a gaseous jet into an open groove (56A, 56B, 56′) formed into the contact surface (54, 54′). Due to the close spacing between immediately adjacent pairs of substrate grippers (22, 22′), the open groove (56A, 56B, 56′) must be very shallow. The open groove (56A, 56B, 56′) can be characterized by having a groove depth into the contact surface (54, 54′) that is between two (2 .00) mm and two and four tenths (2.40) mm. Alternatively, the open groove (56A, 56B, 56′) can be characterized by having a groove width at the contact surface (54, 54′) that is at least three (3) times larger than a groove depth into the contact surface of the substrate gripper.

摘要翻译： 用于同时传送一批衬底（202）的端部执行器（20,20'）。 末端执行器（20,20'）包括一组并列的基板夹持器（22,22'），其具有不超过六（6.00）mm的夹持器对（22,22“）之间的间距。 每个夹持器（22,22'）具有接触表面（54,54'），当将气体射流注入形成到接触表面的开口槽（56A，56B，56'）中时，衬底（202）被夹紧 54,54'）。 由于立即相邻的基板夹持器对（22,22'）之间的紧密间隔，开口槽（56A，56B，56'）必须非常浅。 开口槽（56A，56B，56'）的特征在于具有在两个（2 .00）mm和两个和四分之一（2.40）mm之间的接触表面（54,54'）中的凹槽深度。 或者，开槽（56A，56B，56'）的特征在于，在接触表面（54,54'）处具有凹槽宽度，该槽宽度大于进入接触表面的凹槽深度的至少三（3）倍 基板夹具。