公开(公告)号：US20080310939A1

公开(公告)日：2008-12-18

申请号：US11763597

申请日：2007-06-15

申请人： Chieh-Huan Ku ,  Yung-Ho Chen ,  Jyh-Chang Lin ,  Richard Peng

发明人： Chieh-Huan Ku ,  Yung-Ho Chen ,  Jyh-Chang Lin ,  Richard Peng

IPC分类号： H01L21/31

CPC分类号： H01L21/67778 ,  H01L21/67775 ,  H01L21/67781

摘要： A system for use in semiconductor manufacture including a process tool for processing wafers; a buffer coupled to the process tool for holding wafer waiting to be processed by the process tool; an input load port coupled to the buffer for feeding in wafers ready for processing from a load-in container; an output load port coupled to the process tool for feeding out wafers that have been processed by the process tool to a load-out container; and a track module for transporting the wafers between the buffer, the process tool, and the input and output load ports.

摘要翻译： 一种用于半导体制造的系统，包括用于处理晶片的处理工具; 耦合到处理工具的缓冲器，用于保持晶片等待被处理工具处理; 输入负载端口，耦合到缓冲器，用于馈送准备好从承载容器处理的晶片; 输出负载端口，其耦合到所述处理工具，用于将已经由所述处理工具处理的晶片送出到负载输出容器; 以及用于在缓冲器，处理工具和输入和输出负载端口之间传送晶片的轨道模块。

公开(公告)号：US20060038509A1

公开(公告)日：2006-02-23

申请号：US10921120

申请日：2004-08-19

申请人： Yi-Fang Lin ,  Ming-Hsiang Yu ,  Jyh-Chang Lin ,  Yun Wang ,  Yen Chu ,  Ying-Fu Wang

发明人： Yi-Fang Lin ,  Ming-Hsiang Yu ,  Jyh-Chang Lin ,  Yun Wang ,  Yen Chu ,  Ying-Fu Wang

IPC分类号： H05B41/36

CPC分类号： H05B33/0869

摘要： A system for the throughput detection and feedback of optical energy for making sure of white balance of the LED array in a flat fluorescent light source when the LED array in emitting light by respectively connecting in series a selected LED lamp respectively from RGB LED groups in an LED array to an optical energy sensor to convert optical energy into equivalent amperage, then voltage analog signals to digital signals for a CPU to compare and solve the difference of optical energy to improve voltage output, which then regulated by a driver and fed back to the LED array.

公开(公告)号：US07045974B2

公开(公告)日：2006-05-16

申请号：US10921120

申请日：2004-08-19

申请人： Yi-Fang Lin ,  Ming-Hsiang Yu ,  Jyh-Chang Lin ,  Yun Yun Wang ,  Yen Chuan Chu ,  Ying-Fu Wang

发明人： Yi-Fang Lin ,  Ming-Hsiang Yu ,  Jyh-Chang Lin ,  Yun Yun Wang ,  Yen Chuan Chu ,  Ying-Fu Wang

IPC分类号： G05F1/00

CPC分类号： H05B33/0869

摘要： A system for the throughput detection and feedback of optical energy for making sure of white balance of the LED array in a flat fluorescent light source when the LED array in emitting light by respectively connecting in series a selected LED lamp respectively from RGB LED groups in an LED array to an optical energy sensor to convert optical energy into equivalent amperage, then voltage analog signals to digital signals for a CPU to compare and solve the difference of optical energy to improve voltage output, which then regulated by a driver and fed back to the LED array.

摘要翻译： 一种用于在LED阵列发光时确定LED阵列在平面荧光光源中的白平衡的系统，用于分别将所选择的LED灯与RGB LED组分别串联连接 LED阵列到光能传感器将光能转换成等效电流，然后将电压模拟信号转换为数字信号，以供CPU用于比较和解决光能的差异，从而提高电压输出，然后由驱动器调节并反馈到 LED阵列