Heating of fluidized bed reactor by microwaves
    1.
    发明授权
    Heating of fluidized bed reactor by microwaves 失效
    通过微波加热流化床反应器

    公开(公告)号:US5374413A

    公开(公告)日:1994-12-20

    申请号:US55240

    申请日:1993-04-28

    摘要: An improved method is provided for the deposition of high-purity silicon on silicon particles from silicon source gases in a fluidized bed reactor which is divided into a heating zone and a reaction zone by a partition. Silicon particles in the heating zone are fluidized by a carrier gas such as hydrogen and are heated by microwaves. On the other hand, the reaction zone for the deposition of silicon, through which reaction gases including the silicon source pass, is heated by particle mixing between the reaction zone and the upper section of the heating zone. Subsequently, a desired reaction temperature at the reaction zone is maintained stable without deteriorating the microwave heating of the heating zone.

    摘要翻译: 提供了一种改进的方法,用于在流化床反应器中从硅源气体在硅颗粒上沉积高纯度硅,该流化床反应器通过分隔分为加热区和反应区。 加热区中的硅颗粒被诸如氢的载气流化,并被微波加热。 另一方面,通过反应区和加热区的上部之间的粒子混合,使包含硅源的反应气体通过的硅沉积反应区被加热。 随后,反应区域的期望反应温度保持稳定,而不会使加热区域的微波加热恶化。

    Fluidized bed reactor heated by microwaves
    2.
    发明授权
    Fluidized bed reactor heated by microwaves 失效
    由微波炉加热的流化床反应器

    公开(公告)号:US5382412A

    公开(公告)日:1995-01-17

    申请号:US55239

    申请日:1993-04-28

    摘要: An improved reactor for a high-temperature deposition reaction on seed particles is constructed with a fluidized bed which is divided into a heating zone and a reaction zone by a partition. Seed particles in the heating zone are fluidized by a carrier gas and are heated by microwaves. On the other hand, the reaction zone for the deposition reaction, through which reaction gases pass, is heated by particle mixing between the reaction zone and the upper section of the heating zone. Subsequently, a desired reaction temperature at the reaction zone is maintained stable without deteriorating the microwave heating of the heating zone.

    摘要翻译: 用流化床构建用于种子颗粒上的高温沉积反应的改进反应器,该流化床通过隔板分成加热区和反应区。 加热区中的种子颗粒被载气流化,并被微波加热。 另一方面,反应气体通过的用于沉积反应的反应区通过反应区和加热区的上部之间的颗粒混合被加热。 随后,反应区域的期望反应温度保持稳定,而不会使加热区域的微波加热恶化。

    Precision digitally-controlled variable attenuation circuit
    3.
    发明授权
    Precision digitally-controlled variable attenuation circuit 失效
    精密数字控制可变衰减电路

    公开(公告)号:US5208842A

    公开(公告)日:1993-05-04

    申请号:US786665

    申请日:1991-11-01

    IPC分类号: H03H11/24

    CPC分类号: H03H11/24

    摘要: A precise digitally-controlled variable attenuation circuit for adjusting e attenuation of a signal in an external circuit includes a signal magnitude detector, a resistance adjustment control, and a resistance divider network. The signal magnitude detector has lower and upper threshold limits representing a desired range of attenuation and is operable to receive and compare a control signal with the lower and upper threshold limits, and, in response thereto, produce either a first signal if the control signal is less than the lower threshold limit or a second signal if the control signal is greater than the upper threshold limit. The adjustment control is capable of receiving the first and second signals and is operable to produce either a digital count-down signal in response to the first signal or a digital count-up signal in response to the second signal. The resistance divider network has a fixed resistance and a digitally-adjustable device with a variable resistance. The fixed resistance is connected between a pair of terminals of an external circuit between which a signal is applied. The variable resistance is connected between one of the terminals of the external circuit and the adjustment control. The digitally-adjustable device will increase or decrease its variable resistance, and thereby correspondingly decrease or increase the attenuation by the divider network of the signal of the external circuit, in response to receiving respectively the digital count-up or count-down signal from the adjustment control.

    摘要翻译: 用于调整外部电路中的信号的衰减的精确的数字控制可变衰减电路包括信号幅度检测器,电阻调节控制和电阻分配器网络。 信号幅度检测器具有表示期望的衰减范围的较低和较高阈值极限,并且可操作以接收和比较控制信号与下限和上限阈值极限,并且响应于此,产生第一信号,如果控制信号为 小于下限阈值或第二信号,如果控制信号大于上限阈值。 调节控制能够接收第一和第二信号,并且可操作以响应于第二信号而产生响应于第一信号或数字计数增加信号的数字递减衰减信号。 电阻分压器网络具有固定电阻和具有可变电阻的数字可调节器件。 固定电阻连接在施加信号的外部电路的一对端子之间。 可变电阻连接在外部电路的一个端子和调节控制之间。 数字可调节装置将增加或减小其可变电阻,从而响应于分别接收来自外部电路的信号的数字递增计数或倒数信号,相应地减小或增加外部电路的信号的分频网络的衰减 调整控制。