MICROSYSTEM COMPONENT WITH A DEVICE DEFORMABLE UNDER THE EFFECT OF TEMPERATURE CHANGES
    1.
    发明申请
    MICROSYSTEM COMPONENT WITH A DEVICE DEFORMABLE UNDER THE EFFECT OF TEMPERATURE CHANGES 有权
    具有温度变化影响的器件变形的微结构元件

    公开(公告)号:US20090213900A1

    公开(公告)日:2009-08-27

    申请号:US11813308

    申请日:2006-01-04

    IPC分类号: G01K5/00

    摘要: A microsystem component with a device (3) deformable under the influence of temperature changes is disclosed. The device comprises at least one first (4, 5) and second (8) element with differing thermal expansion coefficients and different thermal conductivities. The elements (4, 5; 8) are physically separate and arranged and connected to each other such that the device (3) assumes flexure states which are dependent on the temperature.

    摘要翻译: 公开了一种具有在温度变化影响下可变形的装置(3)的微系统部件。 该装置包括具有不同热膨胀系数和不同热导率的至少一个第一(4,5)和第二(8)元件。 元件(4,5; 8)在物理上是分开的并且彼此连接并且连接,使得装置(3)呈现取决于温度的弯曲状态。

    Microsystem component with a device deformable under the effect of temperature changes
    2.
    发明授权
    Microsystem component with a device deformable under the effect of temperature changes 有权
    具有可在温度变化影响下变形的器件的微系统元件

    公开(公告)号:US08128282B2

    公开(公告)日:2012-03-06

    申请号:US11813308

    申请日:2006-01-04

    IPC分类号: G01K5/62

    摘要: A microsystem component with a device (3) deformable under the influence of temperature changes is disclosed. The device comprises at least one first (4, 5) and second (8) element with differing thermal expansion coefficients and different thermal conductivities. The elements (4, 5; 8) are physically separate and arranged and connected to each other such that the device (3) assumes flexure states which are dependent on the temperature.

    摘要翻译: 公开了一种具有在温度变化影响下可变形的装置(3)的微系统部件。 该装置包括具有不同热膨胀系数和不同导热率的至少一个第一(4,5)和第二(8)元件。 元件(4,5; 8)在物理上是分开的并且彼此连接并且连接,使得装置(3)呈现取决于温度的弯曲状态。