公开(公告)号：US06689213B2

公开(公告)日：2004-02-10

申请号：US10096314

申请日：2002-03-13

申请人： Takayuki Kubo ,  Katsuhito Makiyama ,  Tatsuya Yabusame

发明人： Takayuki Kubo ,  Katsuhito Makiyama ,  Tatsuya Yabusame

IPC分类号： C30B1500

CPC分类号： C30B15/10 ,  Y10T117/1032 ,  Y10T117/1052

摘要： To impart flexibility suitable for recovery of a quartz crucible to a divided type graphite crucible and avoid damage to the quartz crucible due to the flexibility. A graphite crucible 10 is divided into two or more parts by radial dividing lines 14. An opening 11a is provided in a center of a bottom of the graphite crucible 10. A protrusion 21 fitting into the opening 11a is provided on a crucible placing surface of a crucible tray 20. An inner diameter d2 of the opening 11a is 0.04 to 0.9 times an inner diameter d1 of a straight body portion of the graphite crucible 10. An outer diameter D2 of the crucible tray 20 is 0.5 or more times an outer diameter D1 of the straight body portion of the graphite crucible 10. Minimum thickness of the crucible tray 20 is 15 mm or more.

摘要翻译： 赋予适于将石英坩埚回收到分割型石墨坩埚中的柔性，并且避免由于柔性而损坏石英坩埚。 石墨坩埚10通过径向分割线14分成两部分或更多部分。在石墨坩埚10的底部的中心设置有开口部11a。在开口部11a的坩埚载置面 坩埚托盘20.开口11a的内径d2为石墨坩埚10的直体部的内径d1的0.04〜0.9倍。坩埚托盘20的外径D2为外径的0.5倍以上 石墨坩埚10的直体部分的D1。坩埚托盘20的最小厚度为15mm以上。