DESIGN SUPPORT APPARATUS, METHOD, AND RECORDING MEDIUM
    1.
    发明申请
    DESIGN SUPPORT APPARATUS, METHOD, AND RECORDING MEDIUM 有权
    设计支持设备,方法和记录介质

    公开(公告)号:US20110161910A1

    公开(公告)日:2011-06-30

    申请号:US12975988

    申请日:2010-12-22

    CPC classification number: G06F17/5036

    Abstract: A design support apparatus includes: a circuit-data generation unit to generate circuit data based on layout information of a semiconductor integrated circuit; and a parameter determination unit to set a first parameter relating to mechanical stress exerted on a transistor including at least one of a plurality of gates in a diffusion region, wherein the circuit-data generation unit obtains a mobility of the transistor based on the first parameter and reflects the mobility in the circuit data.

    Abstract translation: 设计支持装置包括:电路数据生成单元,用于基于半导体集成电路的布局信息生成电路数据; 以及参数确定单元,用于设置与包括扩散区域中的多个栅极中的至少一个的晶体管相关的机械应力的第一参数,其中所述电路数据生成单元基于所述第一参数获得所述晶体管的迁移率 并反映电路数据中的移动性。

    LAYOUT METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    2.
    发明申请
    LAYOUT METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    布线方法和制造半导体器件的方法

    公开(公告)号:US20120329266A1

    公开(公告)日:2012-12-27

    申请号:US13494145

    申请日:2012-06-12

    CPC classification number: H01L27/0207 H01L27/11807

    Abstract: A plurality of gate electrode patterns to be laid out in parallel are alternately set as first patterns to be formed in a first exposure step of double patterning and as second patterns to be formed in a second exposure step. Subsequently, a circuit that includes transistor pairs each formed by connecting one of the first patterns and one of the second patterns in parallel is laid out. This reduces the risk of variations in characteristics of transistors caused by double patterning.

    Abstract translation: 交替地设置并列布置的多个栅极电极图案,以作为在双重图案化的第一曝光步骤中形成的第一图案和作为在第二曝光步骤中形成的第二图案。 随后,布置包括通过将第一图案和第二图案中的一个平行地连接而形成的晶体管对的电路。 这降低了由双重图案化引起的晶体管特性变化的风险。

    Layout method and method of manufacturing semiconductor device
    4.
    发明授权
    Layout method and method of manufacturing semiconductor device 有权
    制造半导体器件的布局方法和方法

    公开(公告)号:US09021405B2

    公开(公告)日:2015-04-28

    申请号:US13494145

    申请日:2012-06-12

    CPC classification number: H01L27/0207 H01L27/11807

    Abstract: A plurality of gate electrode patterns to be laid out in parallel are alternately set as first patterns to be formed in a first exposure step of double patterning and as second patterns to be formed in a second exposure step. Subsequently, a circuit that includes transistor pairs each formed by connecting one of the first patterns and one of the second patterns in parallel is laid out. This reduces the risk of variations in characteristics of transistors caused by double patterning.

    Abstract translation: 交替地设置并列布置的多个栅极电极图案,以作为在双重图案化的第一曝光步骤中形成的第一图案和作为在第二曝光步骤中形成的第二图案。 随后,布置包括通过将第一图案和第二图案中的一个平行地连接而形成的晶体管对的电路。 这降低了由双重图案化引起的晶体管特性变化的风险。

    Support apparatus, method, and recording medium
    5.
    发明授权
    Support apparatus, method, and recording medium 有权
    支持装置,方法和记录介质

    公开(公告)号:US08386991B2

    公开(公告)日:2013-02-26

    申请号:US12975988

    申请日:2010-12-22

    CPC classification number: G06F17/5036

    Abstract: A design support apparatus includes: a circuit-data generation unit to generate circuit data based on layout information of a semiconductor integrated circuit; and a parameter determination unit to set a first parameter relating to mechanical stress exerted on a transistor including at least one of a plurality of gates in a diffusion region, wherein the circuit-data generation unit obtains a mobility of the transistor based on the first parameter and reflects the mobility in the circuit data.

    Abstract translation: 设计支持装置包括:电路数据生成单元,用于基于半导体集成电路的布局信息生成电路数据; 以及参数确定单元,用于设置与包括扩散区域中的多个栅极中的至少一个的晶体管相关的机械应力的第一参数,其中所述电路数据生成单元基于所述第一参数获得所述晶体管的迁移率 并反映电路数据中的移动性。

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