VACUUM PROCESSING APPARATUS AND PROCESSING METHOD USING THE SAME
    1.
    发明申请
    VACUUM PROCESSING APPARATUS AND PROCESSING METHOD USING THE SAME 有权
    真空加工装置及其加工方法

    公开(公告)号:US20120160164A1

    公开(公告)日:2012-06-28

    申请号:US13325108

    申请日:2011-12-14

    申请人: Kazuhiro KAMEYAMA

    发明人: Kazuhiro KAMEYAMA

    IPC分类号: C23C16/52

    CPC分类号: C23C14/568 C23C14/54

    摘要: A vacuum processing apparatus includes: a process chamber capable of reducing a pressure; a transport unit, provided in the process chamber, for transporting a plurality of substrates; a gas supply unit for supplying a gas to process the substrates in the process chamber; a substrate processing unit for processing the substrates placed on the transport unit; a detection unit for detecting a substrate interval between adjacent substrates out of the plurality of substrates; and a control unit for controlling, based on the substrate interval detected by the detection unit, a supply amount of the gas to be supplied by the gas supply unit.

    摘要翻译: 真空处理装置包括:能够降低压力的处理室; 传送单元,设置在所述处理室中,用于传送多个基板; 用于提供气体以处理处理室中的基板的气体供应单元; 基板处理单元,用于处理放置在所述输送单元上的基板; 检测单元,用于检测所述多个基板中的相邻基板之间的基板间隔; 以及控制单元,用于基于由检测单元检测到的基板间隔,控制由气体供给单元供应的气体的供给量。

    Vacuum processing apparatus and processing method using the same
    3.
    发明授权
    Vacuum processing apparatus and processing method using the same 有权
    真空处理装置及其处理方法

    公开(公告)号:US09121099B2

    公开(公告)日:2015-09-01

    申请号:US13325108

    申请日:2011-12-14

    申请人: Kazuhiro Kameyama

    发明人: Kazuhiro Kameyama

    IPC分类号: C23C16/52 C23C14/56 C23C14/54

    CPC分类号: C23C14/568 C23C14/54

    摘要: A vacuum processing apparatus includes a process chamber; a transport unit for transporting a plurality of substrates; a gas supply unit; a substrate processing unit for processing the substrates placed on the transport unit; a detection unit for detecting a substrate interval between adjacent substrates out of the plurality of substrates; and a control unit for controlling, based on the substrate interval detected by the detection unit, a supply amount of the gas to be supplied by the gas supply unit.

    摘要翻译: 真空处理装置包括处理室; 用于输送多个基板的输送单元; 气体供应单元; 基板处理单元,用于处理放置在所述输送单元上的基板; 检测单元,用于检测所述多个基板中的相邻基板之间的基板间隔; 以及控制单元,用于基于由检测单元检测到的基板间隔,控制由气体供给单元供应的气体的供给量。

    Two-color image forming apparatus
    4.
    发明授权
    Two-color image forming apparatus 失效
    双色成像设备

    公开(公告)号:US4619518A

    公开(公告)日:1986-10-28

    申请号:US759326

    申请日:1985-07-26

    IPC分类号: G03G15/01 G03G15/00

    CPC分类号: G03G15/0126

    摘要: When, in a two-color image forming apparatus, a first visible image is formed on a photosensitive drum, and sequentially a second visible image is formed on the drum on which the first visible image remains, said second visible image being different in color from said second visible image, a cylindrical non-magnetic sleeve rotates in a direction opposite to a rotation of a permanent magnet equipped with the sleeve, thereby enabling a developer to be conveyed in a direction opposite to a rotation of the permanent magnet.

    摘要翻译: 当在双色图像形成装置中在感光鼓上形成第一可视图像时,依次在第一可视图像残留的滚筒上依次形成第二可视图像,所述第二可视图像的颜色不同于 所述第二可见图像,圆柱形非磁性套筒沿与装配有套筒的永磁体的旋转相反的方向旋转,从而使显影剂能够沿与永磁体的旋转相反的方向传送。