公开(公告)号：US5384167A

公开(公告)日：1995-01-24

申请号：US31492

申请日：1993-03-15

申请人： Atsushi Nishiwaki ,  Norihito Ikemiya ,  Hiroshi Uchiyama ,  Hideo Inagaki ,  Yasuo Sawada ,  Kazumi Ogino

发明人： Atsushi Nishiwaki ,  Norihito Ikemiya ,  Hiroshi Uchiyama ,  Hideo Inagaki ,  Yasuo Sawada ,  Kazumi Ogino

IPC分类号： C23C16/50 ,  C23C8/36 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  B05D3/06

CPC分类号： C23C8/36

摘要： This invention provides a method for the surface treatment of a metal, which comprises the steps of: placing at least a surface to be treated of a metal to be treated between two electrodes facing each other under an atmosphere of a mixed gas consisting of an inert gas and a reactant gas; and plasma exciting said mixed gas under atmospheric pressure to effect glow discharge between said electrodes. The method of the present invention uses an apparatus simpler than that used in a conventional method and can inject into the surface layer of a metal, even those elements which have been difficult to with the conventional method, and can readily modify surface properties of a metal such as surface hardness, surface wettability, etc.

摘要翻译： 本发明提供了一种用于表面处理金属的方法，其包括以下步骤：在由惰性气体组成的混合气体的气氛下，将待处理金属的至少一个待处理表面放置在彼此面对的两个电极之间 气体和反应气体; 以及在大气压下等离子体激发所述混合气体，以在所述电极之间实现辉光放电。 本发明的方法使用比常规方法中使用的装置更简单的装置，并且可以注入到金属的表面层中，甚至是用常规方法难以达到的元素，并且可以容易地改变金属的表面性质 如表面硬度，表面润湿性等