Method of Manufacturing Thin-Film Solar Panel and Laser Scribing Apparatus
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    发明申请
    Method of Manufacturing Thin-Film Solar Panel and Laser Scribing Apparatus 审中-公开
    制造薄膜太阳能电池板和激光划线设备的方法

    公开(公告)号:US20110136265A1

    公开(公告)日:2011-06-09

    申请号:US12962212

    申请日:2010-12-07

    IPC分类号: H01L21/66 B23K26/00

    摘要: The present invention provides a method of manufacturing a thin-film solar panel with a laser scribing process to perform linear groove processing by irradiating a thin-film layer formed on a substrate with laser light to be separated from adjacent structure, including steps of: specifying an accurate position, size, shape of a adhered foreign matter on a glass substrate, a glass scratch, an air-bubble in the glass substrate causing an imperfection by inspecting a scribe line; and performing repair processing to form a new scribe line to bypass a portion of the imperfection after a final scribe line is formed.

    摘要翻译: 本发明提供一种制造具有激光划线工艺的薄膜太阳能电池板的方法,通过用形成在衬底上的薄膜层进行线性沟槽处理,该激光与相邻结构分离,包括以下步骤:指定 在玻璃基板上的粘合异物的精确位置,尺寸,形状,玻璃刮痕,玻璃基板中的气泡,通过检查划线而导致不完美; 并且在形成最终划线之后进行修复处理以形成新的划线以绕过缺陷的一部分。