ALIGNMENT APPARATUS FOR SEMICONDUCTOR WAFER
    2.
    发明申请
    ALIGNMENT APPARATUS FOR SEMICONDUCTOR WAFER 审中-公开
    半导体波形对准装置

    公开(公告)号:US20100171966A1

    公开(公告)日:2010-07-08

    申请号:US12648565

    申请日:2009-12-29

    IPC分类号: G01B11/14

    CPC分类号: H01L21/681

    摘要: An alignment apparatus of this invention includes a holding stage that is larger in size than a semiconductor wafer, and an optical sensor that optically detects a position of a peripheral edge of the semiconductor wafer placed on and suction-held by the holding stage. The holding stage has a slits formed thereon vertically in a circumferential direction, and an outer periphery of the semiconductor wafer lies on the slits. The optical sensor is of a transparent type and includes a projector and a photodetector opposed vertically to each other with the slit interposed therebetween. The optical sensor measures the peripheral edge of the semiconductor wafer on the slits of the holding stage.

    摘要翻译: 本发明的对准装置包括尺寸大于半导体晶片的保持台,以及光学检测放置在保持台上并被保持的半导体晶片的周缘的位置的光学传感器。 保持台具有在周向上垂直形成的狭缝,并且半导体晶片的外周位于狭缝上。 光学传感器是透明型的,并且包括投影仪和光电探测器,它们彼此垂直对置,并且狭缝插入其间。 光学传感器在保持台的狭缝上测量半导体晶片的周边边缘。

    Multiple error processor in automatic work handling apparatus
    5.
    发明授权
    Multiple error processor in automatic work handling apparatus 失效
    多重错误处理器在自动处理装置中

    公开(公告)号:US4992928A

    公开(公告)日:1991-02-12

    申请号:US292969

    申请日:1989-01-03

    IPC分类号: G05B9/02 G05B19/042

    摘要: A multiple error processor in an automatic work handling apparatus includes controlling a number of operating mechanisms individually by the operation of control devices corresponding thereto. The operating mechanisms are controlled to stop for errors arising thereon according to stop mode data which corresponds to the errors. The operating mechanisms are controlled to restart-up according to restart-up data corresponding to a first generated error and also for ensuing errors occurring after the first error and before all of the operating mechanisms come to a stop. The errors are stored in an error code memory in an error recovery device.

    摘要翻译: 自动作业处理装置中的多重误差处理器包括通过对应于其的控制装置的操作来分别控制多个操作机构。 根据对应于错误的停止模式数据,控制操作机构停止其上产生的错误。 控制操作机构根据对应于第一个生成的错误的重新起动数据重新启动,并且在第一个错误之后以及在所有操作机构停止之前发生随后的错误。 错误存储在错误恢复设备中的错误代码存储器中。