公开(公告)号：US09151936B2

公开(公告)日：2015-10-06

申请号：US13989398

申请日：2011-11-07

申请人： Rolf Wartmann ,  Kerstin Winkler ,  Joerg Sprenger

发明人： Rolf Wartmann ,  Kerstin Winkler ,  Joerg Sprenger

IPC分类号： G02B3/02 ,  G02B15/14 ,  G02B15/173 ,  G02B13/22 ,  G02B21/02 ,  G02B21/22

CPC分类号： G02B15/14 ,  G02B13/22 ,  G02B15/173 ,  G02B21/025 ,  G02B21/22

摘要： The invention relates to an optical inspecting system designed to image an object to be inspected with a variable imaging scale, comprising a variation system for imaging the object into infinity, a lens group downstream of the variation system for imaging the object from infinity into the image plane of the whole system, and a light source for generating light in order to illuminate the object, means for imaging the illuminating light into the exit pupil of the variation system being provided in the airspace between the fifth lens group and the subsequent lens group. Of the five lens groups of the variation system, the first, second, and fourth lens groups, when seen in the imaging direction, are arranged in a movable manner in the direction of the optical axis, whereas the third and fifth lens groups are not movable.

摘要翻译： 本发明涉及一种被设计成用可变成像刻度对被检物进行成像的光学检查系统，包括用于将物体成像为无穷远的变体系统，用于将物体从无限远成像成变形系统的变体系统下游的透镜组 平面，以及用于产生光以照亮物体的光源，用于将照明光成像到设置在第五透镜组和后续透镜组之间的空间中的变体系统的出射光瞳的装置。 在变化系统的五个透镜组中，当在成像方向上看时，第一，第二和第四透镜组以可移动的方式在光轴方向上布置，而第三和第五透镜组不是 活动。

公开(公告)号：US20130308201A1

公开(公告)日：2013-11-21

申请号：US13989398

申请日：2011-11-07

申请人： Rolf Wartmann ,  Kerstin Winkler ,  Joerg Sprenger

发明人： Rolf Wartmann ,  Kerstin Winkler ,  Joerg Sprenger

IPC分类号： G02B15/14

CPC分类号： G02B15/14 ,  G02B13/22 ,  G02B15/173 ,  G02B21/025 ,  G02B21/22

摘要： The invention relates to an optical inspecting system designed to image an object to be inspected with a variable imaging scale, comprising a variation system for imaging the object into infinity, a lens group downstream of the variation system for imaging the object from infinity into the image plane of the whole system, and a light source for generating light in order to illuminate the object, means for imaging the illuminating light into the exit pupil of the variation system being provided in the airspace between the fifth lens group and the subsequent lens group. Of the five lens groups of the variation system, the first, second, and fourth lens groups, when seen in the imaging direction, are arranged in a movable manner in the direction of the optical axis, whereas the third and fifth lens groups are not movable.

摘要翻译： 本发明涉及一种被设计成用可变成像刻度对被检物进行成像的光学检查系统，包括用于将物体成像为无穷远的变体系统，用于将物体从无限远成像成变形系统的变体系统下游的透镜组 平面，以及用于产生光以照亮物体的光源，用于将照明光成像到设置在第五透镜组和后续透镜组之间的空间中的变体系统的出射光瞳的装置。 在变化系统的五个透镜组中，当在成像方向上看时，第一，第二和第四透镜组以可移动的方式在光轴方向上布置，而第三和第五透镜组不是 活动。