公开(公告)号：US07542880B2

公开(公告)日：2009-06-02

申请号：US11278840

申请日：2006-04-06

申请人： Richard P. Good ,  Kevin A. Chamness ,  Uwe Schulze

发明人： Richard P. Good ,  Kevin A. Chamness ,  Uwe Schulze

IPC分类号： G06F19/00 ,  H03F1/26 ,  H04B15/00 ,  G01N37/00 ,  G06F15/00 ,  G06F17/18 ,  G06F11/30 ,  G21C17/00 ,  G05B13/02 ,  G06F7/60 ,  G06F17/10

CPC分类号： G05B19/41865 ,  G05B13/048 ,  G05B2219/32053 ,  G05B2219/37532 ,  G05B2219/45031 ,  Y02P90/20

摘要： A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting factor to discount the state observation is generated based on the process time. A state estimate is generated based on the discounted state observation. A system includes a process tool, a metrology tool, and a process controller. The process tool is operable to perform a process in accordance with an operating recipe. The metrology tool is operable to generate a state observation associated with the process. The process controller is operable to receive the state observation, the state observation having an associated process time, generate a weighting factor to discount the state observation based on the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.

摘要翻译： 用于估计与过程相关联的状态的方法包括接收与该过程相关联的状态观察。 状态观察具有相关的处理时间。 基于处理时间生成打折状态观察的权重因子。 基于贴现状态观察来生成状态估计。 系统包括处理工具，计量工具和过程控制器。 处理工具可操作以根据操作配方执行处理。 计量工具可操作以产生与该过程相关联的状态观察。 过程控制器可操作以接收状态观察，具有相关联的处理时间的状态观察，基于处理时间生成加权因子以折扣状态观察，基于打折状态观察生成状态估计，并且至少确定 基于状态估计的操作配方的一个参数。