公开(公告)号：US20050115351A1

公开(公告)日：2005-06-02

申请号：US10843361

申请日：2004-05-12

申请人： Kazuo Kimata ,  Takao Nakamori ,  Katsuhiko Kato ,  Kiyonori Nakano

发明人： Kazuo Kimata ,  Takao Nakamori ,  Katsuhiko Kato ,  Kiyonori Nakano

IPC分类号： H01L21/68 ,  B25J19/00 ,  B65G49/06 ,  B65G49/07 ,  F16J15/34 ,  H01L21/677 ,  B25J17/00

CPC分类号： B25J19/0083 ,  Y10T74/20305

摘要： A seal structure is provided between an upper end portion (11a) of a main body housing (11) and an outer peripheral surface of an. arm driving shaft (13), an annular mechanical seal (51) which is pressure contacted with the outer peripheral surface of the arm driving shaft, an annular seal holding member (54) which holds the annular mechanical seal (51), and a floating action holding means (55) which is arranged between the upper end portion (11a) of the main body housing and the annular seal holding member (54), holds the annular seal holding member (54) so as to freely float and adjusts an attitude of the annular mechanical seal (51) in accordance with a tilting motion of the arm driving shaft (13).

摘要翻译： 密封结构设置在主体外壳（11）的上端部（11a）与外壳（11）的外周面之间。 臂驱动轴（13），与臂驱动轴的外周表面压力接触的环形机械密封件（51），保持环形机械密封件（51）的环形密封件保持构件（54） 布置在主体壳体的上端部分（11a）和环形密封件保持构件（54）之间的动作保持装置（55）保持环形密封保持构件（54），以便自由地浮动和调节 根据臂驱动轴（13）的倾斜运动，环形机械密封（51）的姿态。