公开(公告)号：US06234738B1

公开(公告)日：2001-05-22

申请号：US09288513

申请日：1999-04-08

申请人： Kazuo Kimata ,  Katsuhiko Kato

发明人： Kazuo Kimata ,  Katsuhiko Kato

IPC分类号： B65G4907

CPC分类号： H01L21/68707 ,  Y10S414/137 ,  Y10S414/141

摘要： In a thin substrate transferring apparatus of this invention, the transfer stroke of a hand of a robot is lengthened and the swivel radius is made small resulting in a more compact apparatus. The apparatus has cassettes, housing a substrate, a robot transferring the substrate, and at least one processing unit. The robot has a vertical swivel arm body swiveling in the vertical direction on a machine bed, and a horizontal swivel arm body having two arm sets swiveling in the horizontal direction on a movable machine bed. The vertical swivel arm body has a first arm and a second arm respectively joined rotatable in the vertical direction and a hand is moved substantially in parallel in the vicinity of the cassettes, or the processing unit, and the horizontal swivel arm body has a first link and a second link and the hand is moved into the cassettes, or the processing unit.

摘要翻译： 在本发明的薄基板输送装置中，机器人的手的传送行程被延长，并且旋转半径变小，导致更紧凑的装置。 该装置具有盒，容纳基板，传送基板的机器人以及至少一个处理单元。 机器人具有在机床上沿垂直方向旋转的垂直旋转臂体，以及具有两个臂组件的水平旋转臂主体，该臂组在可移动机床上沿水平方向旋转。 垂直旋转臂体具有第一臂和第二臂，其分别在垂直方向上可旋转地接合，并且手在盒或处理单元附近基本上平行地移动，并且水平旋转臂主体具有第一连杆 并且第二连杆和手被移动到盒子或处理单元中。

公开(公告)号：US4778331A

公开(公告)日：1988-10-18

申请号：US63956

申请日：1987-06-19

申请人： Kazuo Kimata ,  Susumu Ishikawa

发明人： Kazuo Kimata ,  Susumu Ishikawa

IPC分类号： B65H1/28 ,  B65G49/07 ,  B65H5/04 ,  B65H5/18 ,  H01L21/67 ,  H01L21/677 ,  B65G1/06

CPC分类号： H01L21/67 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/138

摘要： There is disclosed a carrier system for carrying a silicon wafer or a cassette accommodating the wafers to arbitrary positions by loading an arm with them. This carrier system is arranged such that: a screw shaft is perpendicularly provided in a rotationally drivable manner between an upper plate and a bottom plate which are vertically connected through a plurality of guide bars to each other; a movable plate is so disposed as to be vertically movable by the rotation of the screw shaft and is guided by the guide bars in a vertically slidable manner between the upper plate and the bottom plate; a cylindrical member is perpendicularly so provided on the movable plate as to be rotationally drivable and penetrate the upper plate and protrude upwards therefrom; a horizontal movement member is fixed to an upper end of the cylindrical member; a carriage provided with the rotary arm is disposed in a horizontally movable manner on the horizontal movement member; a driving wire spanned between pulleys axially supported within the horizontal movement member is secured to the carriage; and the rotary arm including a wafer arm and a cassette arm which are disposed in positions orthogonal to each other is pivotally so supported on the carriage as to vertically rotate through approximately 90.degree.. In this constitution, the carrier system suffices for taking the silicon wafers in and out of the cassette and carrying the cassette itself.

摘要翻译： 公开了一种载体系统，用于通过与其一起装载臂将硅晶片或将晶片容纳到任意位置的盒子。 这种载体系统被布置成使得：螺旋轴以可转动的方式垂直地设置在上板和底板之间，所述上板和底板通过多个导杆彼此垂直连接; 可移动板被设置成可以通过螺杆轴的旋转而垂直移动，并且由导杆以可垂直滑动的方式在上板和底板之间引导; 圆柱形构件垂直地设置在可动板上，以便可旋转地驱动并穿透上板并向上突出; 水平移动构件固定到圆柱形构件的上端; 设置有旋转臂的滑架以水平移动的方式设置在水平移动构件上; 轴向支撑在水平移动构件内的滑轮之间的驱动线被固定到滑架上; 并且包括设置在彼此正交的位置的晶片臂和盒臂的旋转臂被枢转地支撑在滑架上以垂直旋转大约90度。 在这种结构中，载体系统足以将硅晶片进出盒内并携带盒本身。

公开(公告)号：US4735548A

公开(公告)日：1988-04-05

申请号：US39862

申请日：1987-04-20

申请人： Kazuo Kimata ,  Susumu Ishikawa

发明人： Kazuo Kimata ,  Susumu Ishikawa

IPC分类号： H01L21/677 ,  B66C23/00

CPC分类号： H01L21/67766 ,  Y10S414/137

摘要： A carrier system which carries electronic parts mounted on an arm to arbitrary positions within a clean room is disclosed. This carrier system is arranged such that: a screw shaft is perpendicularly provided in a rotationally drivable manner between an upper plate and a bottom plate which are vertically connected through a plurality of guide bars to each other; a movable plate is so disposed as to be vertically movable by the rotation of the screw shaft and is guided by the guide bars in a vertically slidable manner between the upper plate and the bottom plate; a cylindrical member is perpendicularly so provided on the movable plate as to be rotationally drivable which penetrates the upper plate and protrudes upwards; a horizontal moving member is fixed to an upper end of the cylindrical member; a carriage equipped with the arm is so disposed as to be horizontally movable on the horizontal moving member; and a driving wire spanned between pulleys which are axially supported within the horizontal moving member is secured to the carriage. Hence, it is feasible to carry the electronic parts like a silicon wafer in three dimensions within the clean room and to transfer the electronic parts to arbitrary positions with high efficiency without deteriorating the cleanness in the clean room.

摘要翻译： 公开了将安装在臂上的电子部件运送到洁净室内的任意位置的载体系统。 这种载体系统被布置成使得：螺旋轴以可转动的方式垂直地设置在上板和底板之间，所述上板和底板通过多个导杆彼此垂直连接; 可移动板被设置成可以通过螺杆轴的旋转而垂直移动，并且由导杆以可垂直滑动的方式在上板和底板之间引导; 圆柱形构件垂直地设置在可移动板上，以便可旋转地驱动，其穿过上板并向上突出; 水平移动构件固定到圆柱形构件的上端; 配备有臂的托架被布置成在水平移动构件上水平移动; 并且跨越在轴向支撑在水平移动构件内的滑轮之间的驱动线固定到滑架。 因此，将清洁室内的三维的硅晶片等电子部件搬运到高效率地将电子部件转移到任意位置是可行的，而不会使洁净室内的清洁度降低。

公开(公告)号：US20050115351A1

公开(公告)日：2005-06-02

申请号：US10843361

申请日：2004-05-12

申请人： Kazuo Kimata ,  Takao Nakamori ,  Katsuhiko Kato ,  Kiyonori Nakano

发明人： Kazuo Kimata ,  Takao Nakamori ,  Katsuhiko Kato ,  Kiyonori Nakano

IPC分类号： H01L21/68 ,  B25J19/00 ,  B65G49/06 ,  B65G49/07 ,  F16J15/34 ,  H01L21/677 ,  B25J17/00

CPC分类号： B25J19/0083 ,  Y10T74/20305

摘要： A seal structure is provided between an upper end portion (11a) of a main body housing (11) and an outer peripheral surface of an. arm driving shaft (13), an annular mechanical seal (51) which is pressure contacted with the outer peripheral surface of the arm driving shaft, an annular seal holding member (54) which holds the annular mechanical seal (51), and a floating action holding means (55) which is arranged between the upper end portion (11a) of the main body housing and the annular seal holding member (54), holds the annular seal holding member (54) so as to freely float and adjusts an attitude of the annular mechanical seal (51) in accordance with a tilting motion of the arm driving shaft (13).

摘要翻译： 密封结构设置在主体外壳（11）的上端部（11a）与外壳（11）的外周面之间。 臂驱动轴（13），与臂驱动轴的外周表面压力接触的环形机械密封件（51），保持环形机械密封件（51）的环形密封件保持构件（54） 布置在主体壳体的上端部分（11a）和环形密封件保持构件（54）之间的动作保持装置（55）保持环形密封保持构件（54），以便自由地浮动和调节 根据臂驱动轴（13）的倾斜运动，环形机械密封（51）的姿态。