公开(公告)号：US20090056876A1

公开(公告)日：2009-03-05

申请号：US12087082

申请日：2006-01-30

申请人： Jay Joongsoo Kim ,  Sang Hun Lee ,  Kiyota Arai

发明人： Jay Joongsoo Kim ,  Sang Hun Lee ,  Kiyota Arai

IPC分类号： C23C16/511 ,  C23F1/02

CPC分类号： H01J37/32192 ,  H05H1/46 ,  H05H2001/4622

摘要： A work processing system S is provided with a plasma generating unit PU including a microwave generator 20 for generating microwaves of 2.45 GHz, a waveguide 10 for causing the microwaves to travel and a plasma generator 30 mounted on a surface of the waveguide 13 facing a work W; and a work conveyor C for conveying the work W to pass the plasma generator 30. The plasma generator 30 includes a plurality of arrayed plasma generating nozzles 31 for receiving the microwaves, generating a plasma-converted gas based on a receiving electrical energy and discharging the generated gas. The plasma-converted gas is blown to the work W in the plasma generator 30 while the work W is conveyed by the work conveyor C. It is possible both to successively plasma-process a plurality of works and to efficiently plasma-process works having large areas.

摘要翻译： 工作处理系统S设置有等离子体产生单元PU，其包括用于产生2.45GHz的微波的微波发生器20，用于使微波行进的波导10和安装在面向工作的波导13的表面上的等离子体发生器30 W; 以及用于输送工件W以通过等离子体发生器30的工作输送器C.等离子体发生器30包括用于接收微波的多个排列的等离子体产生喷嘴31，基于接收电能产生等离子体转换气体， 产生气体。 等离子体转换气体在等离子体发生器30中的工件W被吹送，同时工件W被工作输送机C输送。可以连续地等离子处理多个工件，并且有效地等离子体处理具有大的工件 地区