公开(公告)号：US5357304A

公开(公告)日：1994-10-18

申请号：US35251

申请日：1993-03-22

申请人： Kiyotaka Wakamiya ,  Yuuichi Aki ,  Minoru Inagaki

发明人： Kiyotaka Wakamiya ,  Yuuichi Aki ,  Minoru Inagaki

IPC分类号： G03F7/30 ,  G11B7/26 ,  G03D13/00 ,  G03D5/00

CPC分类号： G03F7/3021 ,  G11B7/261

摘要： An image developing apparatus using a laser beam source to produce an original plate for producing a master disk of an optical type recording disk such as video disk and the like. A disk base plate 3 formed thereon with an exposed optically sensitive film 2 is rotated while developing solution 6 is supplied on the optical sensitive film 2 to remove the exposed parts of the film. To monitor the development, a laser beam 8 from a laser beam source 7 is irradiated on an exposed portion of the optical sensitive film 2 which is being dissolved and zero and first order diffraction light 9 and 10 are detected by first and second detectors 11 and 12. Light amount control element 13 are provided to maintain constant the detected level of zero order light by controlling the laser, and the first order light is used to detect a stop time for the development. Stabilization of the zero order light eliminates fluctuations from external sources such as dust, mist etc. The incident light may be controlled by the control element 13 either directly if a semiconductor laser is used or by using a modulator in the light path if a gas laser is used. The semiconductor laser may have a short coherence length which reduces fluctuations caused by multiple interference effects within the glass disk base plate 3 whose thickness can vary.

摘要翻译： 一种使用激光束源产生用于制造诸如视频盘等的光学记录盘的母盘的原版的图像显影装置。 在其上形成有暴露的光敏膜2的盘基板3旋转，同时在光敏膜2上提供显影溶液6以除去膜的暴露部分。 为了监视显影，来自激光束源7的激光束8被照射在被溶解的光敏膜2的露出部分上，零和一阶衍射光9和10被第一和第二检测器11和 光量控制元件13被设置为通过控制激光来保持检测到零级光的水平的恒定，并且一阶光用于检测用于显影的停止时间。 零级光的稳定消除了诸如灰尘，雾等的外部源的波动。入射光可以由控制元件13直接控制，如果使用半导体激光器，或者如果使用气体激光器在光路中使用调制器 用来。 半导体激光器可以具有短的相干长度，其减小由玻璃盘基板3内的多个干涉效应引起的波动，其厚度可以变化。