Planar waveguide grating devices having controlled polarization dependent sensitivity and method of manufacturing thereof
    2.
    发明授权
    Planar waveguide grating devices having controlled polarization dependent sensitivity and method of manufacturing thereof 有权
    具有受控偏振相关灵敏度的平面波导光栅器件及其制造方法

    公开(公告)号:US07420734B2

    公开(公告)日:2008-09-02

    申请号:US10526096

    申请日:2003-08-26

    IPC分类号: G02B5/18

    摘要: Diffraction gratings are formed from grooves each having a reflective facet and a non-reflective facet. The net reflection of TE (Transverse Electric) and TM (Transverse Magnetic) polarizations from the grating structure is traded off against the polarization dependent reflection, by controlling the degree of metallization of the reflective facet and by ensuring that there is no metallization of non-reflective sidewalls. other diffraction gratings are manufactured from trenches etched perpendicular to a waveguide. The trenches are metallized and back-filled with a filling material having a refractive index matched to that of the waveguide. The gratings essentially have no non-reflecting sidewalls with insignificant polarization influence from side walls.

    摘要翻译: 衍射光栅由各自具有反射小面和非反射小面的凹槽形成。 通过控制反射面的金属化程度,并通过确保不存在非金属化反射,通过光栅结构的TE(横向电)和TM(横向磁性)偏振的净反射抵消偏振相关反射, 反射侧壁。 其他衍射光栅由垂直于波导蚀刻的沟槽制造。 沟槽被金属化并用填充材料反向填充,该填充材料的折射率与波导的折射率相匹配。 光栅基本上不具有侧壁具有不显着偏振影响的非反射侧壁。

    Planar waveguide grating devices having controlled polarization dependent sensitivity and method of manufacturing thereof
    3.
    发明申请
    Planar waveguide grating devices having controlled polarization dependent sensitivity and method of manufacturing thereof 有权
    具有受控偏振相关灵敏度的平面波导光栅器件及其制造方法

    公开(公告)号:US20060119945A1

    公开(公告)日:2006-06-08

    申请号:US10526096

    申请日:2003-08-26

    IPC分类号: G02B5/18

    摘要: Diffraction gratings are formed from grooves each having a reflective facet and a non-reflective facet. The net reflection of TE (Transverse Electric) and TM (Transverse Magnetic) polarizations from the grating structure is traded off against the polarization dependent reflection, by controlling the degree of metallization of the reflective facet and by ensuring that there is no metallization of non-reflective sidewalls. other diffraction gratings are manufactured from trenches etched perpendicular to a waveguide. The trenches are metallized and back-filled with a filling material having a refractive index matched to that of the waveguide. The gratings essentially have no non-reflecting sidewalls with insignificant polarization influence from side walls.

    摘要翻译: 衍射光栅由各自具有反射小面和非反射小面的凹槽形成。 通过控制反射面的金属化程度,并通过确保不存在非金属化反射,通过光栅结构的TE(横向电)和TM(横向磁性)偏振的净反射抵消偏振相关反射, 反射侧壁。 其他衍射光栅由垂直于波导蚀刻的沟槽制造。 沟槽被金属化并用填充材料反向填充,该填充材料的折射率与波导的折射率相匹配。 光栅基本上不具有侧壁具有不显着偏振影响的非反射侧壁。