公开(公告)号：US08389962B2

公开(公告)日：2013-03-05

申请号：US13149318

申请日：2011-05-31

申请人： Konstantine Chirko ,  Alon Litman ,  Yoav Nachum

发明人： Konstantine Chirko ,  Alon Litman ,  Yoav Nachum

IPC分类号： G11B9/10 ,  G01B17/02 ,  G06K9/00

CPC分类号： G01R33/025 ,  H01J37/28 ,  H01J2237/0266 ,  H01J2237/2485

摘要： A system and method for noise compensation of a charged particle beam location includes one or more sensors that are spaced apart from each other for sensing magnetic noises within at least one predefined frequency band thereby to provide magnetic noise measurements with synchronous detection of the location of a charged particle beam. Based on the magnetic noise measurements and on relationships between values of the magnetic noises and particle beam location errors, magnetic noise compensations signals are generated. An object is then scanned by a particle beam in response to a desired particle beam scan pattern and the magnetic noise compensation signals.

摘要翻译： 用于带电粒子束位置的噪声补偿的系统和方法包括彼此间隔开的一个或多个传感器，用于感测至少一个预定频带内的磁噪声，由此提供磁噪声测量，同时检测位置的一个 带电粒子束。 基于磁噪声测量以及磁噪声和粒子束位置误差之间的关系，产生磁噪声补偿信号。 然后响应于期望的粒子束扫描图案和磁噪声补偿信号，通过粒子束扫描物体。

公开(公告)号：US20120305763A1

公开(公告)日：2012-12-06

申请号：US13149318

申请日：2011-05-31

申请人： Konstantine Chirko ,  Alon Litman ,  Yoav Nachum

发明人： Konstantine Chirko ,  Alon Litman ,  Yoav Nachum

IPC分类号： G01N23/00

CPC分类号： G01R33/025 ,  H01J37/28 ,  H01J2237/0266 ,  H01J2237/2485

摘要： A system and method for noise compensation of a charged particle beam location includes one or more sensors that are spaced apart from each other for sensing magnetic noises within at least one predefined frequency band thereby to provide magnetic noise measurements with synchronous detection of the location of a charged particle beam. Based on the magnetic noise measurements and on relationships between values of the magnetic noises and particle beam location errors, magnetic noise compensations signals are generated. An object is then scanned by a particle beam in response to a desired particle beam scan pattern and the magnetic noise compensation signals.

摘要翻译： 用于带电粒子束位置的噪声补偿的系统和方法包括彼此间隔开的一个或多个传感器，用于感测至少一个预定频带内的磁噪声，由此提供磁噪声测量，同时检测位置的一个 带电粒子束。 基于磁噪声测量以及磁噪声和粒子束位置误差之间的关系，产生磁噪声补偿信号。 然后响应于期望的粒子束扫描图案和磁噪声补偿信号，通过粒子束扫描物体。