Probe card and method for manufacturing probe card
    2.
    发明申请
    Probe card and method for manufacturing probe card 审中-公开
    探针卡和制造探针卡的方法

    公开(公告)号:US20070134824A1

    公开(公告)日:2007-06-14

    申请号:US11698036

    申请日:2007-01-26

    IPC分类号: H01L21/66

    摘要: A probe card that is manufactured inexpensively. The probe card includes a base plate, a flexible substrate, and a contact probe. The contact probe is a flexible substrate formed from polyimide resin. The contact probe has a plurality of parallel wires. Each wire has a distal end that functions as a contact. The contact probe is produced by cutting a general purpose substrate having a plurality of parallel wires formed at a predetermined pitch. The number of the parallel wires is equal to the number of pads of an LSI chip.

    摘要翻译: 低成本制造的探针卡。 探针卡包括基板,柔性基板和接触探针。 接触探针是由聚酰亚胺树脂形成的柔性基底。 接触探针具有多条平行的线。 每根线都有一个远端作为一个触点。 接触探针通过切割具有以预定间距形成的多条平行线的通用基板来制造。 并联线的数量等于LSI芯片的焊盘数量。