MEMS PACKAGE AND A METHOD FOR MANUFACTURING THE SAME
    3.
    发明申请
    MEMS PACKAGE AND A METHOD FOR MANUFACTURING THE SAME 有权
    MEMS封装及其制造方法

    公开(公告)号:US20110039372A1

    公开(公告)日:2011-02-17

    申请号:US12856101

    申请日:2010-08-13

    IPC分类号: H01L21/78

    摘要: A method is provided for manufacturing a plurality of packages. The method comprises the steps of: applying a means for adhering two or more covers to a substrate; positioning the two or more covers onto the substrate to create one or more channels bounded by the two or more covers and the substrate; coupling the covers to the substrate; depositing a material into the one or more channels; performing a process on the material to affix the material; and singulating along the channels to create the plurality of packages.

    摘要翻译: 提供了一种用于制造多个包装件的方法。 该方法包括以下步骤:施加用于将两个或更多个盖粘合到基底上的装置; 将两个或更多个盖定位到基板上以产生由两个或更多个盖和基板界定的一个或多个通道; 将盖连接到基板; 将材料沉积到所述一个或多个通道中; 在材料上执行一个过程来贴上材料; 并且沿着所述通道分割以创建所述多个包。